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Multilayered medium material multi-parameter measurement method and system

A technology of multi-layer medium and measurement method, applied in measurement devices, phase influence characteristic measurement, instruments, etc., can solve problems such as unsolvable and low efficiency, and achieve the effect of optical filter optimization

Inactive Publication Date: 2008-12-31
BEIHANG UNIV
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Problems solved by technology

Although this method can obtain accurate measurement results, it can only be applied to the situation where there is only one unknown parameter in the multilayer dielectric material, and it cannot solve the problem of simultaneous measurement of multiple parameters, and the efficiency is low

Method used

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  • Multilayered medium material multi-parameter measurement method and system
  • Multilayered medium material multi-parameter measurement method and system
  • Multilayered medium material multi-parameter measurement method and system

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Embodiment approach 1

[0022] image 3 Shown is the implementation of the measurement of the properties of the laser surface plasmon thin film: the experimental measurement system diagram composed of the electromagnetic wave transmitting and receiving subsystem, and the rotating table subsystem. like Figure 4 and Figure 5 Shown, the multilayer dielectric film is made up of K9 glass layers 14 and 18, silver film 15, silicon dioxide film 16 and air layer 17 successively in this embodiment, and the main purpose of this embodiment is to measure the refractive index of all media, and Thickness of silver film and silicon dioxide film. The specific process is as follows: the narrow linewidth laser beam emitted by the laser 4 is modulated by the modulator 5, then polarized by the polarizer 6, and focused by the lens 7 before entering the rotary table subsystem 8, and the focus is located at the center of the multilayer film to be tested position; the laser beam is reflected on the surface of the multil...

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Abstract

The invention provides a method for simultaneously obtaining the multiple electromagnetic parameters of a multilayer material by measuring for one time; by the experiment measurement of an electromagnetic reflecting angular spectrum of one time, accurate determination simultaneously to the thickness and the refractive index of each layer of a multilayer dielectric material is realized by optimal calculation according to an angle when the reflecting angular spectrum is at minimum reflection (or maximal reflection). In the invention, electromagnetic wave energy entering a certain working frequency of a multilayer material system is transmitted and reflected on each material interface, the reflecting electromagnetic wave energy of an incident surface is received by a measuring receiver. The angle of incident wave and the angle of the receiver are adjusted continuously so as to lead the reflecting energy to reach an extremum. The incident angle is supposed to be a given value, optimal search is carried out to the parameters of multilayer material by utilizing the simulated annealing algorithm, and the result is the result of the detected multiple parameters. The method can be applied in the fields of remote sensing parameter inversion and the measurement of plasma on a laser surface, etc., and also can be popularized to the field of the multiple parameter measurement of acoustical multilayer material, and is characterized by high efficiency and accuracy.

Description

technical field [0001] The invention relates to a novel multi-parameter measurement method and system for a multi-layer dielectric material, which is used to obtain the measurement of physical parameters such as thickness and refractive index of the multi-layer dielectric material. Background technique [0002] The precise measurement of parameters such as thickness and refractive index of multilayer materials has a wide range of applications in remote sensing applications, optical communications, photodetectors, chemical and biological sensors, and nanodevices. In these applications, the electromagnetic properties of layered materials ( Refractive index and thickness) are crucial parameters. How to determine the electromagnetic properties of multilayer materials with high precision through a simple measurement has always been an important research topic. [0003] Among the current measurement methods, they can only measure an unknown parameter of the multilayer material, th...

Claims

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Application Information

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IPC IPC(8): G01B11/06G01N21/41
Inventor 何云涛江月松
Owner BEIHANG UNIV
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