Mini sensor for sensing chemical substance

A technology of micro-sensors and chemical substances, applied in scientific instruments, instruments, measuring devices, etc., can solve the problems of waste of identification elements, increase of chip cost, etc., and achieve the effect of reducing waste of biological samples and increasing immobilization efficiency

Inactive Publication Date: 2009-03-11
黄荣山
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the identifier is fixed, a large number of identifiers are often wasted, which increases the cost of chip production
In addition, for the detection of diseases, the consumption of identifiers often accounts for the largest proportion of chip production costs

Method used

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  • Mini sensor for sensing chemical substance
  • Mini sensor for sensing chemical substance
  • Mini sensor for sensing chemical substance

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] see Figure 1A . Figure 1A It is a micro sensor 1 for sensing a chemical substance according to a preferred embodiment of the present invention.

[0019] In practical applications, the chemical substance is one selected from the group consisting of a metal, a macromolecule, a biochemical molecule and a microbial chemical structure.

[0020] Such as Figure 1A As shown, the microsensor 1 includes a substrate 10, a microcantilever 12, an electrode structure 14 and a measurement component (not shown in Figure 1A middle).

[0021] In a preferred embodiment, the substrate 10 can be made of silicon, and the micro-cantilever 12 can be made of silicon nitride (Si 3 N 4 ) or silicon dioxide (SiO 2 ), but not limited to. In addition, in a preferred embodiment, the shape of the micro-cantilever beam 12 can be V-shaped.

[0022] The micro-cantilever 12 is formed on the substrate 10 and has a capture surface 120 for capturing the chemical substance.

[0023] In a preferred em...

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Abstract

The invention provides a micro-sensor used for sensing a chemical substance. The micro-sensor provided by the invention comprises a substrate, a micro-cantilever beam, an electrode structure and a measurement unit, wherein, the micro-cantilever beam is formed on the substrate and used for capturing the capturing surface of the chemical substance, the electrode structure is used for providing an electrical field which is arranged for assisting the capturing surface to capture the chemical substance, the measurement unit is coupled with the micro-cantilever beam and used for measuring a variable quantity of the mechanical property of the micro-cantilever beam caused by the captured chemical substance, and translating the variable quantity into the information related to the chemical substance.

Description

technical field [0001] The present invention relates to a micro-sensor, in particular to a micro-sensor for sensing a chemical substance. Background technique [0002] After entering the era of aging population distribution and uneven distribution of medical resources, bio-sensing chips have attracted great attention from all walks of life in recent years. Both academia and industry have invested a lot of money and manpower in active development and research. [0003] Bio-sensing systems So far, many mature bio-sensing technologies have been developed, and the bio-sensing systems can be classified by different transducers. Among them, the electronic and contact sensing systems have the disadvantages of interfering with the progress of biological reactions and possibly destroying living organisms on the biochip, such as scanning probe microscopy and scanning tunneling microscopy. However, common detection systems often face the problems of high purchase and maintenance costs...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N13/10G01N33/48G01Q80/00
Inventor 黄荣山李世光李世元吴光钟颜毅广
Owner 黄荣山
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