Sub-wave length metal grating polarizer

A metal grating and polarizer technology, applied in polarizing elements and other directions, can solve the problems of low transmittance and extinction ratio, and achieve the effect of improving transmittance and polarization extinction ratio, and overcoming low transmittance and extinction ratio.

Inactive Publication Date: 2009-05-20
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The present invention proposes a sub-wavelength metal grating polarizer, in which corresponding optical films are added at the two interfaces of the incident light and the outgoing light, so that the tr

Method used

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  • Sub-wave length metal grating polarizer
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  • Sub-wave length metal grating polarizer

Examples

Experimental program
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Effect test

Embodiment 1

[0023] as CO 2 Laser sub-wavelength metal grating polarizer, multi-layer dielectric anti-reflection film layer 1 and multi-layer dielectric film layer 3 are the same, both made of ZnSe film layer and YF 3 The composition of the film layer, the optical thickness is 2.86μm and 5.94μm respectively; in the multi-layer dielectric anti-reflection coating layer 1, YF 3 The film layer is close to the substrate, and the ZnSe film layer is on the outer layer; in the multilayer dielectric film layer 3, YF 3 The film layer is close to the substrate, and the ZnSe film layer is close to the metal stripe grating 4; the substrate 2 is a polished ZnSe crystal. When the two polished surfaces of the substrate are not coated with multi-layer dielectric anti-reflection coatings, the transmittance at 10.64 μm wavelength is 70%, and both sides are coated with After the multi-layer dielectric anti-reflection coating, the transmittance is over 98%, the material of the metal stripe grating 4 is gold, ...

Embodiment 2

[0025] As a YAG laser (532nm) sub-wavelength metal grating polarizer, the multilayer dielectric antireflection coating layer 1 and the multilayer dielectric coating layer 3 are both made of ZrO 2 film and SiO 2 Composition of film layer, substrate 2 is double-sided polished BK7 glass; when the two polished surfaces of substrate 2 are not coated with multi-layer dielectric anti-reflection coating, the transmittance at 532nm wavelength is 90%, after both sides are coated with multi-layer dielectric anti-reflection coating , the transmittance is greater than 99%, the material of the metal stripe grating 4 is aluminum, the period is 200nm, the duty ratio is 0.5, and the ratio of depth to width is 5:1, so the grating groove depth is 500nm, and the protective layer 5 is Al 2 o 3 , thickness 30nm.

Embodiment 3

[0027] As a broadband sub-wavelength metal grating polarizer, the multilayer dielectric antireflection coating layer 1 and the multilayer dielectric coating layer 3 are broadband multilayer antireflection coatings, both made of ZrO 2 film layer and MgF 2 The substrate 2 is made of BK7 glass material; when the two polished surfaces of the substrate are not coated with multi-layer dielectric anti-reflection coating, the transmittance in the wavelength range of 400nm to 1200nm is 90%. The pass rate is greater than 97%; the material of the metal stripe grating 4 is aluminum, the period is 100nm, the duty ratio is 0.5, and the ratio of depth to width is 2:1, so the groove depth of the grating is 100nm, and the protective layer 5 is MgF 2 , thickness 10nm.

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Abstract

The invention relates to a sub-wavelength wire-grid polarizer, belongs to an optical polarizer, and in particular relates to a wire-grid polarizer. The polarizer aims to solve the problems that the prior wire-grid polarizer is low in transmission and extinction ratio. A wire stripe grid is arranged on a substrate; the surface of the wire stripe grid is provided with a protective layer; an interface of the substrate connected with the wire stripe grid is provided with a multi-layer dielectric film, and the other interface of the substrate is provided with a multi-layer dielectric anti-reflection film; and the multi-layer dielectric film is one of an anti-reflection film, a reflection film and a band pass filter film. Corresponding optical thin films are arranged on an incident light interface and an emergent light interface, so that the polarizer greatly improves the transmission and the polarization extinction ratio and solves the problems of low transmission and polarization extinction ratio in the prior polarizer; the polarizer can be separately used as an optical polarizer or an optical analyzer, and also can be used as a laser output coupling mirror, wherein the output of the laser is linearly polarized light with tunable wavelength. Moreover, the polarizer can be used in the fields such as optical measurement, optical communication, laser and the like.

Description

technical field [0001] The invention belongs to optical polarization devices, in particular to a wire grid polarizer, which can be used in the fields of optical measurement, optical communication, laser and the like. Background technique [0002] Polarizing devices can generally be divided into traditional devices such as reflective and refractive polarizers, dichroic polarizers, birefringent crystal polarizers, and wire grid polarizers. Traditional polarizers are too bulky to be fabricated and integrated using MEMS technology. For example, when using birefringent crystal polarizers, light must be obliquely incident, so the optical system structure is required to be three-dimensional, and it also increases the difficulty of optical system integration. The period of the grating is smaller than the wavelength of the incident light, which is called sub-wavelength grating. The sub-wavelength metal grating polarizer is a kind of wire grid polarizer. Application prospect. [000...

Claims

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Application Information

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IPC IPC(8): G02B5/30
Inventor 李晓平史铁林刘世元廖广兰汤自荣黄光陈志凌
Owner HUAZHONG UNIV OF SCI & TECH
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