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Method for producing trichlorosilane by using silicon tetrachloride

A technology of silicon tetrachloride and hydrogen, applied in the direction of silicon halide compounds, halosilanes, etc., can solve the problems of inconvenient recycling, high energy consumption, uneconomical and practical, etc.

Inactive Publication Date: 2011-04-06
SICHUAN XINGUANG SILICON TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the existing reaction conditions are not convenient for recycling SiCl 4 , additionally the thermal hydrogenation process converts SiCl 4 The primary conversion rate is only 20%, so the energy consumption is high, and the equipment investment is huge
Therefore, the existing method is not economical and practical

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-4

[0019]

[0020] Table 1 is embodiment 1-4, under the identical situation of temperature and pressure, the conversion situation under the different situations of the ratio of silicon tetrachloride and hydrogen, as can be seen, by increasing the ratio of silicon tetrachloride and hydrogen can Make the reaction proceed in the direction of positive reaction, which is more conducive to the transformation of STC.

Embodiment 5-10

[0022]

[0023] Example 5-10 Under the condition of the same temperature and the same ratio of silicon tetrachloride and hydrogen, the conversion situation under the situation of constantly adjusting the pressure, it can be seen that within a certain range, it is more conducive to the progress of the reaction by increasing the pressure , which increases the chance of the reactant molecules contacting the heating body and increases the effective collision between the reactant molecules, so that the conversion rate of a single reaction is higher, but the pressure increases to a certain extent, which does not provide much for the conversion rate, and also affects the system equipment. The requirements have also become higher, which increases the cost of equipment development and production, and is also detrimental to the safe and stable operation of the system. Generally, the pressure parameter of 0.3-0.6MPa is selected. On the one hand, it has a higher conversion rate, ...

Embodiment 11-16

[0026] In Examples 11-16, under the same pressure and the same ratio of silicon tetrachloride and hydrogen, the conversion of the temperature is constantly adjusted. It can be seen that increasing the temperature within a certain range is beneficial to the reaction, but when the temperature increases to a certain extent It is also difficult to increase the conversion rate when the temperature is increased. Generally, it is more appropriate to choose a temperature of 1200-1400°C.

[0027] Although the conditions of the present invention cannot improve the conversion rate, the conditions are easy to realize, the method is easy to control, is beneficial to the recycling of silicon tetrachloride, and is very beneficial to industrial implementation.

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PUM

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Abstract

This invention discloses a method for producing SiHCl3 by using SiCl4, comprising following steps: firstly, rectifying, refining and purifying to the silicon tetrachloride so as to make the purity of the silicon tetrachloride be 99%; secondly, purifying the hydrogen so as to make the purity of the hydrogen be more than 99%; thirdly, mixing the purified silicon tetrachloride with hydrogen, wherein the proportion of the silicon tetrachloride and the hydrogen is 1mol: 2-5mol; fourthly, leading the mixed gas to react under the condition that is temperature is 1200 to 1400 degrees centigrade and the pressure is 0.2- 0.60MPa, with the air input of 260-530Nm3 / h. This method is convenient for being controlled, and is in favor of recovering the silicon tetrachloride and in favor of industry construction, greatly.

Description

technical field [0001] The invention relates to the field of polycrystalline silicon, in particular to a method for preparing trichlorosilane from silicon tetrachloride as a raw material. Background technique [0002] The rational use of silicon tetrachloride in polysilicon production is an important issue to ensure the normal operation and large-scale production of polysilicon. Although silicon tetrachloride has many uses (used as white carbon black, organic silicon, quartz products, etc.), they all It does not belong to the technology of polysilicon production industry. The most convenient way to apply silicon tetrachloride in polysilicon production is to convert it into trichlorosilane, the raw material of polysilicon, through special technical processes. For many years, there have been direct synthesis methods of silicon tetrachloride, hydrogen, and silicon powder, but all of them are difficult to control due to lengthy process, complex equipment structure, harsh materia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
Inventor 赵兴华蒲晓东陈绍章王岭
Owner SICHUAN XINGUANG SILICON TECH