Static voltmeter correcting assembly, making method thereof and correcting method thereof

Abstract

The present invention provides a correcting assembly used for electrostatic voltmeter, a manufacturing method of correcting assembly and a correcting method thereof. The correcting assembly of electrostatic voltmeter comprises the following components: a base plate; a clamping part which is used for loading and clamping an electrostatic voltmeter; a high-voltage plate which is installed on the front end of moving direction of clamping part and is provided with an input end that provides a correcting standard according with the electrostatic voltmeter; a first slide way part which is installedon the base board and is provided with a body with one pair of first rails penetrating the clamping part; a scaleplate part which is installed on one side of clamping part and is provided with a graduated scale, a positioning bolt and a division indicator, and digital scratching marks are provided on the graduated scale; a second slide way part which is installed on the body of clamping part and is provided with one pair of second rails penetrating the clamping paw part that generates relative motion to the body; and a fine adjusting part which is provided at the back end of clamping part body and is used for fine adjusting the distance between the clamping paw part and the body.

Description

technical field [0001] The invention relates to a calibration assembly of an electrostatic voltmeter, its manufacturing method and its calibration method, in particular to a static voltmeter calibration assembly with a structure of coarse adjustment and fine adjustment, which can accurately calibrate the static voltmeter. Background technique [0002] In the current semiconductor industry, the main purpose of electrostatic protection is the following four points: [0003] (1) Increased yield (Increased Yields): If the electrostatic protection is not good, it is likely that the components will be damaged due to the influence of static electricity during the production of semiconductor components. Moreover, in every process, there is the possibility of electrostatic damage. Therefore, proper electrostatic protection can increase production. [0004] (2) Cost Saying: Due to the high process yield of semiconductor components, the relative process cost can be reduced. Therefor...

AI Technical Summary

Problems solved by technology

The traditional static voltmeter calibration method is only a simple manual calibration method, and there is no more accurate calibration method to calibrate the static voltmeter

If the calibration accuracy is low, it may be due to the inaccurate measurement of the static voltage meter, resulting in the continuous accumulation of static electricity in the process machine, which may eventually lead to the destruction of the manufactured semiconductor components due to excessive static electricity.

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