Support pin

Abstract

The invention provides a supporting pin applied to a dry etching device, which comprises a fixed lock base, a body and a supporting arm, wherein the supporting arm is detachably fixed at the top end of the fixed lock base, and the body is detachably fixed at the top end of the supporting arm. The supporting pin has the advantages that the supporting pin reduces the volume of a part to be replaced due to the design of detachable assembly of the three components of the supporting pin, not only reduces consumptive material cost, but also is easy to carry out maintenance work such as detachment, replacement, and the like so as to effectively solve the problem of unnecessary cost consumption caused by the replacement of consumptive materials in a current dry etching machine station.

Description

【Technical field】 [0001] The invention relates to a support pin, in particular to a support pin applied to a dry etching device. 【Background technique】 [0002] At present, dry etching devices such as plasma etching apparatuses have been widely used in the production process of liquid crystal display panels to remove the masking layer not covered by the patterned shielding layer such as photoresist. And protected parts to transfer the mask pattern (pattern) to the specific film on the surface of the glass substrate. Plasma etching mainly uses plasma to dissociate reactive gas molecules into ions that are reactive to the film material on the surface of the glass substrate, so as to chemically react with the film on the glass substrate, and then make the particles exposed to the plasma The film is etched and reacted into volatile substances, and then the volatile substances generated by the reaction are extracted from the surface of the glass substrate by a vacuum system. ...

AI Technical Summary

Problems solved by technology

[0007] However, the body 52, which is more than 18 centimeters long, accounts for almost 90% of the length of the entire support pin 50. It not only penetrates into the electrode seat 22 and the base 14, it is not easy to remove, and when replacing the support pin 50, the base 14 needs to be removed first. Only the tubular elements (Bellows) (not shown) in the support pin 50 can be replaced, and after the replacement is completed, it is necessary to reassemble and calibrate the entire base 14 and the dry etching device, which is very time-consuming and labor-intensive.

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