Micro-nano working platform of three-dimensional mobile orthogonal structure

Abstract

The invention relates to a micro-nano working platform of three-dimensional mobile orthogonal structure, belonging to the robotics field and comprising bases, a workbench, three P-4S branched chains and piezoelectric actuators. The bases are connected with the workbench via the three P-4S branched chains formed by flexure hinges; the three branched chains are arranged along three orthogonal direction respectively, and planes formed by pillar axes of each group are orthogonal. Each base corresponding to each branched chain thereon is processed with a parallel plate elasticity sliding joint directly and is provided with a piezoelectric actuator respectively, the movement along the three directions of X, Y and Z can be realized in a manner that the three P-4S branched chains drive the workbench. The invention can realize the three-dimensional movement of zero friction, zero clearance, zero lubrication and zero hysteresis, can be widely applied in the fields of optical fiber connecting, nanometer imprinting, life and genetic engineering, micro-assembling and the like.

Description

technical field [0001] The invention relates to a device in the field of robot technology, in particular to a three-dimensional mobile orthogonal structure micro-nano operating table. Background technique [0002] Parallel micro-manipulation robots have sub-micron to nano-level positioning accuracy, and have broad application prospects in precision machining, electronic packaging, optical fiber docking, biological and genetic engineering, material science, aerospace and other fields, and are famous scholars at home and abroad. topics of concern. Since Ellis first proposed the micro-manipulation robot driven by piezoelectric ceramics in 1962, the research of micro-manipulation robot has attracted the attention of scholars at home and abroad. In 1989, Hara and Sugimoto proposed and studied a micro-robot that replaced traditional hinges with flexible hinges; Stoughton designed a micro-robot consisting of two parallel mechanisms, each with six parallel mechanisms. Composed of ...

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Problems solved by technology

These micro-robots: some have complex structures, some are difficult to calibrate, and some are difficult to decouple displacement

[0003] After searching the literature of the prior art, it was found that "The Motion Condition Design of the Asymmetrical Three-translation Parallel Mechanism" was published by Yang Qizhi et al. in the Journal of Agricultural Machinery, Vol. Design a new type of asymmetric three-translation parallel mechanism based on the helical theory. The disadvantage is that the structure is asymmetric, can not achieve isotropy, and is difficult to calibrate.

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