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Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target

A ceramic, free technology used in the fields of electrodes for electrochemical devices, preparation of high-density ceramics, ceramics and target elements

Active Publication Date: 2009-09-16
加拿大魁北克电力公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0036] There is also a need to provide a method that can be carried out by persons without specific skills in the field of ceramics or sintering, advantageously, the method must be able to obtain targets or target elements, in particular, make it possible to easily produce large surface area target

Method used

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  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target
  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target
  • Ceramic preparation method, resulting ceramics and use thereof, particularly as a cathode sputtering target

Examples

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example

[0198] The following examples are provided for illustrative purposes only, and should not be construed as constituting any limitation on the subject of the present invention.

example 0

[0199] Example 0-Preparation of commercially available ITO ceramics

[0200] In order to prepare a diameter of 5cm and a composition of In 1.9 Sn 0.1 O 3 , A circular ITO target (ceramic) weighing 50g ( Figure 2A ), take the experimental protocol detailed below.

[0201] Step 1) Using the well-known "ball milling" technology to mix 47.3173g of In 2 O 3 And 2.6827g of SnO 2 Mix; for this purpose, put the above powder mixture into Figure 34 In one of the two agate grinding jars shown, each agate grinding jar contains 50 agate balls with a diameter of 8mm; add 30ml ethanol; cover the agate cover as shown in the picture; then, as shown in the picture, "Ball milling" was performed at 250 rpm for 3 hours. The powder thus mixed in ethanol was then put into a beaker, and the powder was dried by heating the powder at 110°C in air for 8 hours.

[0202] Step 2) Put the powder into a cylindrical stainless steel mold with an inner diameter of 60mm, and place the powder at 25 tons / cm 2Press f...

example 1

[0204] Example 1-ITZO target used to prepare transparent metal electrodes for optoelectronic devices

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Abstract

The invention relates to a method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high densitythereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.

Description

Technical field [0001] The invention relates to a method for preparing ceramics, in particular to a method for preparing high-density ceramics. [0002] The invention also relates to ceramics and target elements obtained by implementing the method of the invention. These ceramics and target elements are characterized by excellent mechanical properties, especially high apparent density close to the theoretical density. [0003] In addition, the present invention relates to the use of these ceramics and target elements, in particular, by implementing the method, it is possible to prepare a film as a thin film by sputtering from the target, and to prepare a film for use in electrochemical devices (micro-generators, electro-mechanical devices). Color changing devices, gas sensors, etc.) electrodes. [0004] The membranes and electrodes thus obtained, especially those membranes obtained as thin films with particularly advantageous properties, also constitute an aspect of the present in...

Claims

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Application Information

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IPC IPC(8): C04B35/01C25B11/04
CPCC04B35/462C04B2235/3206C04B2235/77C04B2235/3284C04B2235/3279C04B35/64C23C14/3414C04B35/01C04B35/645C04B2235/3293C04B2235/3203C04B2235/3286
Inventor 居伊·康佩伊亚德·萨阿德丁卡里姆·扎吉尼
Owner 加拿大魁北克电力公司
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