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Method for reacting self-igniting dusts in vacuum pump device

A vacuum pump and dust technology, which is applied to parts, pumps, and pump components of pumping devices for elastic fluids, can solve the safety risks of equipment maintenance personnel, and can not eliminate the problems of dust burning, etc., and achieve the effect of simple and cheap installation

Inactive Publication Date: 2014-05-14
OERLIKON LEYBOLD VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Dust also poses a safety risk for plant maintenance personnel, since ignition of dust cannot be ruled out in the event of incorrect handling or unplanned plant ventilation

Method used

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  • Method for reacting self-igniting dusts in vacuum pump device
  • Method for reacting self-igniting dusts in vacuum pump device
  • Method for reacting self-igniting dusts in vacuum pump device

Examples

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Embodiment Construction

[0019] according to figure 1 A vacuum pump in the form of a screw pump is shown. The vacuum pump has an elongated housing 10 in which are mounted two screw rotors 12 , 14 rotating counter to each other. Each screw rotor has a screw-shaped arrangement of teeth 16, 18 whose pitch decreases continuously from the pump inlet 20 to the pump outlet 22, as in figure 1 can be seen in . Thus, the working chamber, which moves axially as the screw rotor rotates, tapers from the pump inlet 20 to the pump outlet 22 . The compression chamber 24 is between the pump inlet and the pump outlet.

[0020] The pump inlet 20 forms a suction chamber which is connected to the device to be evacuated. Process gas 38 is sucked into this suction chamber. The process gas contains particles 40 in the form of non-oxidized dust.

[0021] The pump inlet 20 is connected to an oxygen inlet 26 mounted laterally on the housing 10 , which has a throttle valve 28 . The throttle valve 28 can be adjusted to dif...

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Abstract

Into a vacuum pump device arranged for suctional intake of a process gas (38) possibly comprising reactive particles (40), oxygen in the form of air or pure oxygen is supplied in a controlled manner via an oxygen intake (26, 26a,26b). Thus, controlled oxidation takes place in the compression chamber (24) such that the dust cannot self-ignite in case of sudden ventilation.

Description

technical field [0001] The invention relates to a method for dissipating spontaneous combustion dust in a dry compression vacuum pump arrangement and a corresponding vacuum pump. Background technique [0002] In metallurgy and various other processes carried out in a vacuum, there are often particles or microdusts which, on the basis of their chemical composition and their larger surfaces, react in such a way that they ignite spontaneously on contact with the outside air , in which particles or microscopic dust react with atmospheric oxygen. Such processes are, for example, the Czochalsky-Verfahren process for producing single crystal silicon or the melting and retorting of steel. In the first case silicon oxide (SiO) is produced and in the second case metallic fine dust such as magnesium powder is produced. These dust particles are sucked into a vacuum pump which creates the vacuum for the process. In oil-sealed vacuum pumps, dust particles are contained by the lubricant...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04C29/00F04C28/28
CPCF04C2280/02F04C18/16F04D3/02F04C28/28F04C2220/12F04D19/04F04C29/0092Y10T137/85986
Inventor 乌韦·策利格托马斯·德赖费特
Owner OERLIKON LEYBOLD VACUUM