Unlock instant, AI-driven research and patent intelligence for your innovation.

Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor

A technology of acceleration sensor and resonant frequency, which is applied in the testing/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, instruments, etc., and can solve the problems such as the difficulty in obtaining the mode of medium and high-range acceleration sensors

Active Publication Date: 2010-11-17
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In terms of implementation, the modal information of the microstructure can be obtained by methods such as vibration table or laser strobe test, which are also limited by the driving mode and driving frequency. These methods are more effective for structures with relatively small elastic coefficients, and for medium and high-range acceleration sensors. There is a certain difficulty in obtaining the modal

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor
  • Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor
  • Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Example 1. Modal resonance frequency of an acceleration sensor with a sensitive direction installation and a range of 6000g

[0046] For the piezoresistive acceleration sensor with a range of 6000g, the computer software Ansys performs theoretical calculation and analysis to obtain the first-order resonance frequencies corresponding to different modes of the acceleration sensor. Among them, the first-order resonance frequency of the sensitive direction is 24.1KHz, and the first-order resonance frequency of the transverse direction is 58.0KHz.

[0047] As shown in Figure 4(a), use double-sided tape or 502 tape to install and fix the device on the metal rod in the sensitive direction. The four pins of the device are connected to the positive, negative and two output terminals of the power supply in a certain order. Bridge form output (such as image 3 shown), the amplifier circuit composed of the operational amplifier and the corresponding resistor and capacitor has a wi...

Embodiment 2

[0049] Example 2. Modal resonance frequency of a non-sensitive laterally mounted acceleration sensor with a range of 6000g

[0050] The steps are the same as Example 1, keep the circuit connection of the sensor, but install the same sensor on the metal aluminum rod according to the non-sensitive direction in Figure 4(b). Also from a height of 5cm, the metal rod is released freely and collides with the metal anvil; the computer software automatically records the output waveform; the power spectrum is obtained through the Fourier transform.

[0051] Figure 8 and Figure 9 It is the relationship between the output voltage waveform of the acceleration sensor and the time and the corresponding power spectrum after the Fourier transform under the non-sensitive lateral installation. Figure 9 In the spectrum of the relationship between output intensity and frequency, it can be found that in the power spectrum below 100KHz, there are two obvious sharp peaks, which are resonance pea...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to and provides a test method for the mode resonance frequency of a piezoresistive acceleration sensor. The invention is characterized in that on the basis of maintaining the original full-bridge circuit connection structure of the piezoresistive acceleration sensor, the abundant frequency spectrum generated by metal collision shock is used as an excitation source, and proper external interface circuit and half-bridge output form are adopted to obtain the resonance frequency information of the acceleration sensor mode, the obtained original data is used for frequency spectrum analysis to obtain micro-structural mode resonance frequency. The resonance frequency of the acceleration sensor mode comprises different resonance frequencies of the same structure of the apparatus in the sensitive direction and non-sensitive direction. First order resonance frequency in different modes of the acceleration sensor are determined to obtain the structure parameters processed and manufactured by the microstructure, and correctness of the structure dimension design is verified to analyze the working state of the apparatus. The test method is applicable to acceleration sensors, pressure sensors and the like which have full-bridge structural high measuring piezoresistance, capacitor and the like.

Description

technical field [0001] The invention relates to providing a method for testing the modal resonance frequency of a piezoresistive acceleration sensor, more specifically to a half-bridge testing method for the modal resonance frequency of a piezoresistive acceleration sensor manufactured by micro-machining of medium and high ranges, belonging to a micro-sensor The field of mechanical testing analysis. Background technique [0002] In micro-nano electromechanical systems (MEMS), mode refers to the vibration mode of a structure, and different vibration modes correspond to different characteristic vibration frequencies. The modal analysis of the microstructure is an important analysis method to obtain the geometrical structure information of the device and verify the working state of the device (3), pp251-258]. The range is 2000g (g=9.8m / s 2 The piezoresistive acceleration sensors fabricated by micromachining above ) have important applications in many fields and are a major a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01P21/00
Inventor 鲍海飞李昕欣宋朝辉刘民
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com