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Methods of patterning a deposit metal on a substrate

A metal deposition, patterning technology, applied in the direction of lithography/patterning, pattern and lithography, metal material coating process, etc., can solve problems such as difficult tool repositioning

Inactive Publication Date: 2009-10-28
3M INNOVATIVE PROPERTIES CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This value is 1000 times greater than the required 3 micron placement accuracy, making precise tool repositioning difficult

Method used

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  • Methods of patterning a deposit metal on a substrate
  • Methods of patterning a deposit metal on a substrate
  • Methods of patterning a deposit metal on a substrate

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Effect test

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[0062] Substrate preparation

[0063] Palladium was deposited onto polyethylene naphthalate (available under the trade names TEIJIN and TEONEX Q65FA from Wilmington, Delaware) using an evaporator (CVC product model SC-4500, Veeco Instruments, Woodbury, NY). DuPont) sheet. Using an integrated quartz crystal microbalance sensor (Crystal Sensor 750-211-G1, Inficon, East Syracuse, NY), equipped with a 6 MHz gold-coated crystal (Part No. 008, Inficon, East Syracuse, NY). -010-G10) deposition controller (Inficon Deposition Controller, Inficon Inc., East Syracuse, NY) controls the thickness of the deposition. Set the average thickness to five Angstroms. The light transmission was reduced from 90% to 88% by palladium deposition as measured by an optical densitometer (Jonathan Allen, Titusville, NJ). Sheet resistance measured before and after palladium deposition was greater than 10,000 Ω per square (conductometer Model 707B, Delcon Instruments, St. Paul Park, Minnesota).

[0064...

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Abstract

An article includes a polymeric film having a major surface, a discontinuous layer of a catalytic material on the major surface, and a metal pattern on the catalytic material. The discontinuous layer of catalytic material has an average thickness of less than 200 angstroms. Methods of forming these articles are also disclosed.

Description

technical field [0001] The present disclosure generally relates to methods of patterning deposited metals on substrates and articles formed from such methods. Background technique [0002] Substrates having patterns of metallic materials have a variety of commercial applications. In some cases, it is desirable for the conductive grid to be thin enough to be invisible to the naked eye and supported on a transparent polymeric substrate. Transparent conductive sheets are used in a variety of applications including, for example, resistively heated windows, electromagnetic interference (EMI) shielding, static dissipating components, antennas, touch screens for computer monitors, and electrochromic windows, optoelectronic devices, electroluminescent devices, and liquid crystals The surface electrodes of the display. [0003] The use of substantially transparent conductive grids for such applications as EMI shielding is known. The grid can be formed from a mesh or screen of wire...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K3/18
CPCH05K2203/0108H05K3/107C23C18/38C23C18/31H05K2201/09036H05K2203/0537H05K3/184C23C18/1608C23C18/208
Inventor 马修·H·弗赖特雷西·J·贝尼纳德罗克珊·A·伯默尔
Owner 3M INNOVATIVE PROPERTIES CO
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