Method and device for preparing film by scanning and vapor deposition

Abstract

The invention belongs to a method and a device for preparing a film by scanning and vapor deposition. A device which leads an electronic gun in a working state to swing or move is set in the method, and the electronic gun can spray in a moving state. In the device, the electronic gun is positioned on the swing device, and the electronic gun sprays in the moving state. The method leads the electronic gun to spray and evenly coat the film in the moving state, and the method is convenient and easy. The device can lead the electronic gun to spray under the moving state, can evenly coat the film, has high speed, low cost and good quality, can greatly increase the photoelectric conversion rate of a base plate and greatly prolong the service life.

Description

technical field [0001] The invention belongs to a scanning evaporation film forming method and equipment. Background technique [0002] Thin-film photovoltaic cells, including CIGS photovoltaic cells, can replace monocrystalline silicon materials for solar power generation. Crystalline silicon materials as photovoltaic power generation materials are expensive, difficult to manufacture, high in cost, and difficult to promote and use. The latest science shows that several layers of metal and non-metal thin films can be deposited on glass or other material substrates by electron gun evaporation method to replace crystalline silicon materials for solar power generation. This new material is cheap and conducive to popularization. Coating several layers of metal thin films on the substrate by electron gun evaporation method requires that the thickness of the thin film must be uniform, but the current equipment is difficult to meet such requirements. The traditional electron gun e...

AI Technical Summary

Problems solved by technology

This traditional equipment cannot guarantee the uniform thickness of the film on the substrate, often resulting in a thick film on the substrate close to the electron gun, otherwise, a thin film

However, the uneven thickness of the film greatly reduces the photoelectric conversion rate of the glass substrate, and the quality consistency is poor, making it difficult to promote and use in the market.

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