Unlock instant, AI-driven research and patent intelligence for your innovation.

Method and device for se aration of silicon wafers

A technology for silicon wafers and equipment, which is applied in the field of separating silicon wafers and equipment, and can solve problems such as brittleness of solar cell wafers

Active Publication Date: 2010-02-17
REC SOLAR
View PDF2 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the other hand, solar cell wafers are very fragile and weak and require delicate handling

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and device for se aration of silicon wafers
  • Method and device for se aration of silicon wafers
  • Method and device for se aration of silicon wafers

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] figure 1 Shown is an apparatus 1 according to the invention for separating silicon wafers from a horizontal stack 10 where a plurality of silicon wafers 12 are arranged in a vertical position in a liquid-filled container 5 . The vertical position means that each die in the stack is positioned vertically, while the actual stack is horizontal.

[0038]The device 1 comprises a transfer device 2 which, in this embodiment of the invention, has one or more suction devices 110 capable of moving the transfer device horizontally and vertically towards the outermost wafers. 2 are attached together to the surface of the outermost silicon wafer 12, and then the silicon wafer 12 is pushed in a substantially vertical plane and in the vertical direction (arrow A) from the stack 10 to the conveyor belt 14, and then on the At the conveyor belt 14, the silicon wafer 12 is laid down and released from the suction device. Said means (not shown) for moving the transport device 2 comprise h...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a method for separation of a silicon wafer (12a) from a vertical stack (10) of silicon wafers (12). The method is characterised in that it comprises attaching a movable transport device (2) to a surface of the silicon wafer (12a) in the stack (10), and horizontal movement of the silicon wafer (12a) parallel (A) to the surface of the silicon wafer (12a) until the silicon wafer (12a) is separated from the stack (10). The invention also comprises a device for implementing the method.

Description

technical field [0001] The present invention relates to a method and apparatus for separating silicon wafers from a horizontal stack of silicon wafers. In this application, the term horizontal stack refers to a stack in which the stacking direction of the wafers is horizontal, ie the surfaces of the wafers lie in a substantially vertical plane. Background technique [0002] In the production of silicon wafers for use in solar cells, silicon ingots are sliced ​​into thin wafers. Typically, these ingots are sawn into wafers in a parallel fashion and in a liquid-cooled sawing process, and as a result of this and subsequent processes, the product consists of a stack of moist, thin silicon wafers. In subsequent processes, each individual wafer is processed individually. [0003] Separation of each individual wafer from the stack is currently performed as a manual operation where the operator lifts / pulls the outermost wafer from the stack and places them in a cassette or sequent...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/683B65G49/06B28D5/00
CPCB65G2249/04B65G49/061B28D5/0082B65G49/068Y10T156/19H01L21/67766H01L21/67778
Inventor 佩尔·阿尔内·王阿尔内·拉姆斯兰奥勒·克里斯蒂安·特朗鲁德埃里克·耶塔斯本特·哈梅尔安德烈·斯凯伊奥拉·特朗鲁德
Owner REC SOLAR