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Two-dimensional laser autocollimator

An autocollimator and two-dimensional laser technology, which is applied in the direction of instruments, optical devices, and measuring devices, can solve the problems of large measurement range and high measurement accuracy, and achieve the effects of ensuring measurement accuracy, high measurement accuracy, and improving performance

Active Publication Date: 2010-04-07
安徽中科春谷激光产业技术研究院有限公司
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Problems solved by technology

[0011] The purpose of the present invention is to propose a two-dimensional laser autocollimator, which can simultaneously meet Requirements for large measurement range, high measurement accuracy and fast measurement speed

Method used

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0033] see first image 3 , image 3 It is a schematic diagram of the basic structure of the two-dimensional laser autocollimator of the present invention. It can be seen from the figure that the two-dimensional laser autocollimator of the present invention comprises left-handed and right-handed circles with reticle information on the horizontal optical axis. Polarized light generation device 1, to generate left-handed circularly polarized light and right-handed circularly polarized light with reticle information to form a centrally symmetrical "cross" beam output, along the direction of the horizontal optical axis and the "cross" The beam advancing direction is provided with the first common dichroic prism 2, the collimating objective lens 7 and the target reflector 8 in ...

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Abstract

The invention relates to a two-dimensional laser autocollimator. The autocollimator comprises a generation device of left-hand and right-hand circular polarized light with reticule information on a horizontal optical axis, as well as a first common beam splitter prism, a collimating object lens and a target reflector which are sequentially arranged in the horizontal optical axis direction and the advance direction of a 'cross' light beam, wherein the generation device generates the left-hand and right-hand circular polarized light with the reticule information to form centrosymmetric 'cross' light beam output; the beam-splitting plane of the first common beam splitter prism is in a 45-degree included angle with the horizontal optical axis; a first lambda / 4 wave plate, a first polarization splitting prism and a horizontal linear array CCD are sequentially arranged on one side of the first common beam splitter prism; and a vertical linear array CCD is arranged in the reflected light direction of the first polarization splitting prism. The two-dimensional laser autocollimator has the characteristics of high measuring precision, large measuring range and capacity of static or dynamic measurement.

Description

technical field [0001] The invention relates to a precision test and measurement instrument, in particular to a two-dimensional laser autocollimator. The invention can be applied to optical-mechanical adjustment, prism angle calibration, straightness measurement of guide rails, flatness measurement of table tops, detection of inertial navigation testing equipment such as precision turntables, and other measurement tests and scientific research work. Background technique [0002] Autocollimator is an important optical precision angle measuring instrument, which is widely used in machinery manufacturing, shipbuilding, aerospace, metrology testing, scientific research and other fields. Apply new photodetection devices (such as CCD, PSD or QAPD, etc.) to the autocollimator system to form a photoelectric autocollimator, which overcomes the manual reading and tracking zero error of the traditional autocollimator, and greatly improves the measurement of the system precision and ea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
Inventor 高敏卞正兰董作人方祖捷瞿荣辉
Owner 安徽中科春谷激光产业技术研究院有限公司
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