Mass flow sensor
A technology of mass flow and sensors, applied in the direction of mass flow measurement devices, etc., can solve the problems of complicated manufacturing process, large volume, poor corrosion resistance of glue, etc.
Active Publication Date: 2010-05-19
BEIJING SEVENSTAR ELECTRONICS CO LTD
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Problems solved by technology
Ordinary thermal mass flow sensors are large in size and complex in manufacturing process, and the connection between the sensor tube and the sensor base is in the form of glue. The disadvantages are: the reliability of the glue cannot be guaranteed, and the glue is hot and cold It is easy to age and leak under alternating conditions, and the corrosion resistance of the glue is poor, etc.
In addition, there are many problems in the actual use process, such as: large zero drift, poor anti-interference ability, very sensitive to the installation position, poor repeatability, long response time and easy to break the sensor wire, etc.
Method used
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[0025] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0026] refer to Figure 1 to Figure 3 , the embodiment of the present invention provides a thermal mass flow sensor, which includes a sensor base 1, a first cover 2, a second cover 3, an insulation layer 4, a copper bracket 5, a sensor tube 6, a solder block 7, a flat cable 8. Sensing wire 9, fastening screw 10. There are two welding blocks 7 and two sets of sensing wires 9 .
[0027] Wherein, the two welding blocks 7 are installed in the corresponding two holes of the sensor base 1; the two groups of sensing wires 9 are wound around the symmetrical position in the middle of the sensing tube 6; the sensing The pipe 6 is inserted into the hole of the welding block 7, and...
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The invention discloses a thermal mass flow sensor, which comprises a sensor base (1), a first outer cover (2), a second outer cover (3), a nugget (7), a sensing tube (6) and a sensing wire (9), wherein the first outer cover (2) and the second outer cover (3) are arranged on the sensor base (1); the first outer cover (2) and the second outer cover (3) are mutually attached; a groove is formed between the first outer cover (2) and the second outer cover (3); the groove is internally provided with a flat cable (8); the nugget (7) is arranged at the bottom of the sensor base (1); the sensing tube (6) is arranged in a hole of the nugget (7); the sensing wire (9) is wound onto the sensing tube (6); and the hole of the nugget (7) is communicated with the groove. The thermal mass flow sensor has the advantages of small volume, light weight, easy installation and the like, and has the characteristics of small null shift, strong anti-jamming capability, fast response, no sensitivity to installation azimuth, high repeat accuracy, durable sensing wire and the like.
Description
technical field [0001] The invention relates to the field of gas mass flow controllers, in particular to a mass flow sensor on a gas mass flow controller. Background technique [0002] The mass flow sensor is applied to the gas mass flow controller. As a key component for measuring the gas mass flow, its performance has a great influence on the overall performance of the gas mass flow controller. Ordinary thermal mass flow sensors are large in size and complex in manufacturing process, and the connection between the sensor tube and the sensor base is in the form of glue. The disadvantages are: the reliability of the glue cannot be guaranteed, and the glue is hot and cold It is easy to age and leak under alternating conditions, and the corrosion resistance of the glue is poor. In addition, there are many problems in the actual use process, such as: large zero drift, poor anti-interference ability, very sensitive to the installation position, poor repeatability, long response...
Claims
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IPC IPC(8): G01F1/76
Inventor 苏乾益牟昌华
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD