Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power

A technology of microelectronic machinery and microwave power, which is applied in the direction of electric power measurement by thermal method, generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, etc., which can solve the problem of affecting detection accuracy and restricting application Range and other issues to achieve the effect of improving microwave frequency response

Inactive Publication Date: 2010-06-09
SOUTHEAST UNIV
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AI Technical Summary

Problems solved by technology

The disadvantage of traditional microwave power sensors is that the output DC voltage has a strong dependence on microwave frequency, which affects the accuracy of detection and limits the scope of application.

Method used

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  • Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power
  • Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power
  • Device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power

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Embodiment Construction

[0017] The microelectromechanical microwave frequency response compensation type microwave power detection device of the present invention is a microwave frequency response compensation type microwave power detection device, and the specific implementation scheme is as follows:

[0018] The device utilizes three identical power sensors (power sensor A, power sensor B, power sensor C) supplemented by a power divider 16, differential amplifier 17, adder 18:

[0019] Microelectromechanical microwave frequency response compensation type microwave power detection device of the present invention comprises three identical power sensors and is supplemented with power divider 16, differential amplifier 17, adder 18:

[0020] The microwave signal to be measured is divided into two by the power divider 16, and its output end obtains two completely identical microwave signals to be measured, that is, the first microwave power P to be measured. 1 and the second microwave power P to be meas...

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Abstract

The invention discloses a device for detecting micro-electro mechanical microwave frequency response compensate-type microwave power, aiming at realizing the microwave frequency response compensate-type microwave power by detecting the difference of the microwave power with the same size when the microwave power with the same size under a central frequency point and a frequency point to be detected is detected by using a completely same power sensor. A microwave signal to be detected is divided into two signals through a power distributor (16), and the output end acquires two completely same microwave signals to be detected, i.e. a first microwave power to be detected (P1) and a second microwave power to be detected (P2). The first microwave power to be detected (P1) is connected with a coplanar waveguide transmission line (1) of a second power sensor (B), the second microwave power to be detected (P2) is connected with the coplanar waveguide transmission line (1) of a third power sensor (C), and the microwave power under the central frequency point (10GHz) the size of which is equal to that of the first microwave power to be detected (P1) and the second microwave power to be detected (P2) is connected with the coplanar waveguide transmission line (1) of the first power sensor (A).

Description

technical field [0001] The invention provides a microwave power detection device based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In the research of microwave technology, the power of microwave signal is one of the most important parameters of microwave circuit and microwave system. Microwave power measurement is essential in the research of any microwave equipment and microwave working system control. The most common microwave power detector is a microwave power sensor based on the principle of thermoelectric conversion. It converts the power of the microwave signal into heat through the load resistance, and then uses the Seebeck effect of the thermopile to convert the heat into a power proportional to the microwave power to be measured. The thermoelectric potential (DC voltage) output. The disadvantage of traditional microwave power sensors is that the outpu...

Claims

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Application Information

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IPC IPC(8): G01R21/02B81B7/02
Inventor 廖小平王德波
Owner SOUTHEAST UNIV
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