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Method for preparing sapphire protective film on surface of platen glass

A technology of manuscript glass and sapphire, which is applied in the field of preparation of aluminum oxide protective film on the surface of manuscript glass, can solve the problems of low hardness, short service life and high cost of use of manuscript glass, and improve wear resistance and abrasion resistance Good, the effect of reducing work efficiency

Inactive Publication Date: 2010-06-16
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of low hardness and poor wear resistance of the existing platen glass, resulting in short service life and high cost of use. The present invention provides a method for preparing a sapphire protective film on the surface of the platen glass

Method used

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  • Method for preparing sapphire protective film on surface of platen glass
  • Method for preparing sapphire protective film on surface of platen glass

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specific Embodiment approach 1

[0010] Specific Embodiment 1: The preparation method of the sapphire protective film on the surface of the platen glass in this embodiment is realized through the following steps: 1. Clean the platen glass with ultrasonic waves for 50-80 minutes, and then place the platen glass in a filter cathodic arc deposition device On the sample stage in the vacuum chamber; 2. Vacuum the vacuum chamber to 1.0×10 -6 ~9.9×10 -6 Argon gas is introduced after Torr, and the flow rate of argon gas is controlled to be 18-24cm 3 / min, when the pressure in the vacuum chamber reaches 8.0×10 -5 ~1.0×10 -4 During Torr, turn the sample stage to the ion cleaning position, perform ion cleaning on the platen glass surface for 10-20 minutes, then turn off the argon gas, and then turn the sample stage to the deposition position; 3. Continue to vacuumize the vacuum chamber, when the vacuum degrees up to 1.0 x 10 -6 ~9.9×10 -6 During Torr, the sample stage is heated to 400-1000°C, and then oxygen is int...

specific Embodiment approach 2

[0014] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that the specific method of ultrasonic cleaning the platen glass in step 1 is: first, ultrasonically clean the platen glass with acetone for 20 minutes, and then ultrasonically clean the platen glass with anhydrous alcohol for 20 minutes , and finally ultrasonically cleaned with deionized water for 20 minutes. Other steps and parameters are the same as those in Embodiment 1.

[0015] In this embodiment, both acetone and absolute alcohol are commercially available products of analytical purity.

specific Embodiment approach 3

[0016] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that in step two, the vacuum chamber is evacuated to 2.0×10 -6 ~6×10 -6 Argon gas was introduced after Torr. Other steps and parameters are the same as those in Embodiment 1 or Embodiment 2.

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Abstract

The invention discloses a method for preparing a sapphire protective film on the surface of platen glass, and relates to method for preparing an aluminum oxide protective film on the surface of the platen glass. The method solves the problem that the conventional platen glass has short service life and high use cost due to the low hardness and the poor wear resistance. The method comprises the following steps of: ultrasonically cleaning the platen glass and putting the platen glass on a sample table; vacuumizing and introducing argon, performing ion cleaning on the platen glass and transferring the sample table to a deposition position; continuously vacuumizing and introducing oxygen, setting a deposition parameter, starting a device and plating; and backwashing to obtain the sapphire protective film. In the sapphire protective film, the nanometer microhardness is 14.89 to 16.03GPa; and the optical transmissivity of a scanning signal with a wave band of between 670 and 690nm is over 80 percent. The sapphire protective film has the advantages of improving the hardness and the wear resistance of the platen glass, ensuring the transmissivity of the scanning signal, prolonging the service life of the platen glass and reducing the use cost.

Description

technical field [0001] The invention relates to a preparation method of an aluminum oxide protective film on the surface of platen glass. Background technique [0002] Platen glass is widely used in scanning windows of photocopiers, projectors, scanners and other equipment, requiring high light transmission and good wear resistance. Sapphire (transparent α-alumina single crystal) is a typical material with high light transmittance and high wear resistance. However, the cost of preparing platen glass from pure sapphire is too high and unacceptable. The main component of the widely used platen glass is silicon dioxide, which has good light transmission, but low hardness and poor wear resistance. Due to the frequent contact and friction between the scanning windows of photocopiers, projectors, scanners and other equipment with manuscripts and commodities, scratches are likely to occur, resulting in blurred scanning windows and a decrease in signal transmittance, which reduces ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/22
Inventor 韩杰才朱嘉琦张小朋王冬峣左洪波
Owner HARBIN INST OF TECH