Semiconductor solenoid inductor and manufacture method thereof
A manufacturing method and solenoid technology, applied in the field of inductance, can solve the problems of occupation, large chip area, inability to generate large magnetic induction intensity, etc., and achieve the effects of reducing chip area, improving integration, and improving magnetic induction intensity.
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[0019] The invention discloses a semiconductor solenoid inductor, such as figure 2 , image 3 and Figure 4 As shown, it includes multiple upper metal strips 1 and multiple lower metal strips 2, a magnetic core 3 is sandwiched between the upper metal strip 1 and the lower metal strip 2, the upper metal strip 1 and the lower metal strip 2 The strips 2 are connected end to end in sequence through the contact holes 4 to form a solenoid that surrounds the magnetic core 3 in the same direction, and the magnetic core 3 is surrounded by an insulating medium 5 .
[0020] like image 3 As shown, the magnetic core is strip-shaped.
[0021] like Figure 4 As shown, the magnetic core is annular.
[0022] The invention also discloses a manufacturing method of the above-mentioned semiconductor solenoid inductor, which comprises the following steps in sequence:
[0023] (1) Photolithography and etching to form lower metal strips 2, such as Figure 5 shown;
[0024] (2) An insulating...
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