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Three-dimensional feature detection device

A detection device and a technology of three-dimensional topography, which are applied in the field of three-dimensional topography detection devices, can solve the problems of inability to obtain surface topography data of an object to be tested, etc.

Active Publication Date: 2011-08-10
IND TECH RES INST
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  • Claims
  • Application Information

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Problems solved by technology

The present invention proposes a three-dimensional shape detection device, which can effectively overcome the problem that when the surface slope of the shape of the object to be measured is large, the reflected light signal on the surface of the object to be measured cannot enter the microscope, and the problem that the surface shape data of the object to be measured cannot be obtained

Method used

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Embodiment Construction

[0026] The implementation method of the three-dimensional shape detection system framework provided by the present invention will be illustrated as follows with reference to the accompanying drawings, but the implementation is only for illustration and not for limitation.

[0027] Such as figure 2 As shown, the three-dimensional shape detection device 20 mainly includes two optical detection devices 21 and 22 , which are located on both sides of an arc track 23 . The optical detection device 21 utilizes the hinge 25 to slide on the arc track 23, and the optical detection device 22 also utilizes the hinge (its setting position is similar to the position of the hinge 25 relative to the optical detection device 21, but it is just blocked by the optical detection system 22 and not seen in the Among the figure) slide in arc track 23. The arc track 23 is integrally formed and has good rigidity, which can improve the precision of the moving position of the optical detection devices...

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Abstract

The invention provides a three-dimensional feature detection device which contains at least two optical detection devices and an inclination angle adjusting mechanism. The at least two optical detection devices are arranged on the inclination angle adjusting mechanism to adjust the inclination angles of the optical detection devices. When the inclination angles of the at least two optical detection devices are changed, focal points of the at least two optical detection devices are kept on a same position; and a to-be-measured object is positioned within a field range of the at least two optical detection devices. The at least two optical detection devices are used for capturing image data for image reconstruction, namely the three-dimensional feature of the to-be-measured object can be obtained.

Description

technical field [0001] The invention relates to an optical detection device, in particular to a three-dimensional shape detection device. Background technique [0002] Precise shape detection is a very important part of modern technology. When many components are gradually miniaturized, accurate and reliable detection technology is needed to verify the accuracy of their microstructure size or shape, so as to control the quality and manufacturing process. Among them, the measurement technology using optical non-contact detection method can obtain accurate shape data of the surface of the object to be measured in a non-destructive manner, and has been widely used in various industries. [0003] refer to figure 1 , when the topographic surface slope of the object to be measured 12 is large, because the magnification of the objective lens commonly used in the optical microscope 11 is less than 20 times, the numerical aperture in this interval is too small, which will cause the ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 王伟诚郭世炫陈金亮
Owner IND TECH RES INST