Method for improving slow wave component heat dispersion by utilizing nano material
A technology of nano-materials and heat dissipation performance, applied in the field of improving the heat dissipation performance of slow wave components, can solve the problems of physical damage of traveling wave tubes, average output power attenuation, affecting yield and device service life, etc., and achieve the effect of improving radiation heat dissipation capability
Inactive Publication Date: 2011-08-31
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology
When the temperature is too high, it will not only lead to the attenuation of the average output power, but also may cause physical damage to the entire traveling wave tube. In the development and production process of high-power continuous wave traveling wave tube, it will affect the yield and the service life of the device.
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[0023] The present invention is a method for improving the cooling performance of slow-wave components by using nanomaterials, which is the application of nano-iridium films with high radiation capability. The specific implementation method is as follows:
[0024] Put the sample into the DC magnetron sputtering table; vacuumize and bake the sample, the baking temperature is controlled at 200°C; observe the vacuum condition in the sputtering table, when the vacuum reaches 8×10 ～4 At Pa, fill in argon (Ar) gas to reduce the vacuum and increase the pressure to 5-30Pa; at this time, turn on the DC sputtering power supply (voltage 350V, current 200mA) to sputter the metal target iridium (Ir) 20 minutes; due to the high air pressure in the vacuum chamber, the sputtered atoms collide with each other to form larger atomic groups, that is, nanoparticles, such as figure 1 As shown in , the particle diameter is 100 nm.
[0025] The metal target is a metal that can withstand a certain te...
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The invention discloses a method for improving slow wave component heat dispersion by utilizing nano material, relating to the microwave device technology. The method includes the steps that: a sample is placed into a direct current magnetron sputtering table; vacuumizing is carried out, and the sample is baked, the baking temperature is controlled to be 200 DEG C; vacuum situation in sputtering table is observed, and inert gas (argon) is charged when vacuum is 8x10-4Pa, so as to reduce the vacuum to be 5-30Pa; a direct current sputtering power supply (voltage 350V and current 200mA) is started, sputtering on metal target (Ir) is carried out for 20 minutes; as the air pressure in the vacuum chamber is higher, atoms sputtered at the moment collide each other to form larger atom group, namely nano particle, nano particle is deposited on the surface of the sample to form a nano metal film, so as to improve radiating capacity of slow wave component surface, thus improving the heat dispersion of slow wave component.
Description
technical field [0001] The invention relates to the technical field of microwave devices and the application of nanometer materials, and is an important method for improving the heat dissipation performance of slow wave components. Background technique [0002] With the rapid progress of modern science and technology, new materials, new processes and new technologies are constantly emerging, and the performance and technical indicators of traveling wave tubes have also made great progress, but it also brings high heat load. When the traveling wave tube works in the limit state of its characteristics, its reliability and stability will become particularly important. Among the various characteristics of the helical traveling wave tube, the thermal characteristic is a very important index, not only the main factor determining the average output power of the traveling wave tube, but also directly affecting the working stability and reliability of the traveling wave tube major f...
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IPC IPC(8): H01J9/00H01J23/00C23C14/14C23C14/02C23C14/35
Inventor 韩勇刘燕文丁耀根刘濮鲲
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI