Trichlorosilane de-dusting device and de-dusting process

Abstract

The invention discloses a trichlorosilane de-dusting device and a de-dusting process. The de-dusting device comprises a scrubbing tower, wherein the lower part of the scrubbing tower is provided with a synthetic gas feeding pipe, and the upper part thereof is provided with a synthetic gas discharge pipe; the scrubbing tower is connected with a silicon tetrachloride addition device; the synthetic gas flowing out of a synthetic furnace is de-dusted by a cloth bag and then is de-dusted by adopting the wet method; during the wet-method de-dusting, the spraying process is adopted, and silicon tetrachloride that is the by-product in the trichlorosilane process is adopted as a detergent, therefore, the silicon tetrachloride that is the by-product generated by the trichlorosilane can be recycled,so that the silicon tetrachloride can be well utilized, so as to meet the environmental requirement; and the problems that the pipeline is blocked by aluminium choride and ferric trichloride can be also solved. The invention can reduce the blocking degree of the device and the pipeline caused by the subsequent material in the condensation process of a main condensator to the utmost limit and can prolong the period of stable operation, thereby greatly improving the safety and the continuity of the production of a system.

Description

technical field [0001] The invention relates to trichlorosilane dedusting equipment, which can remove impurities such as aluminum and iron in silicon powder during the production of trichlorosilane. The invention also relates to the production process of the dedusting equipment, which belongs to the technical field of chemical industry. Background technique [0002] In the production of trichlorosilane, because the silicon powder contains impurities such as aluminum and iron, in the reaction process with HCL, the formation of aluminum trichloride and ferric chloride is very easy to block the subsequent system pipeline, resulting in the failure of the entire production system Stable, not continuous. At present, trichlorosilane manufacturers set up 2-4 precoolers to cool aluminum and iron chlorides in the precoolers, and clean the precoolers once a week to solve the problem of pipe blockage in the system. Regular cleaning of the pre-cooler is highly dangerous, increases equip...

AI Technical Summary

Problems solved by technology

Regular cleaning of the pre-cooler is highly dangerous, increases equipment operating costs, consumes manpower and material resources, and is not conducive to the continuous and stable operation of production

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