Light source device

Abstract

A light source device that irradiates a discharge vessel with a laser beam to produce radiant light that is reflected by an ellipsoidal reflecting surface efficiently utilizes the light produced by directing the laser beam through an unirradiated region where reflected light from the ellipsoidal reflector is blocked by the discharge vessel, through an opening side of the ellipsoidal reflector to the discharge vessel. The discharge vessel has an emission substance enclosed inside which is excited by the laser beam and produces radiant light, is arranged at a focal point of the ellipsoidal reflector. A planar mirror, with which radiant light reflected by the ellipsoidal reflector is reflected in a different direction has a window in an unirradiated region where reflected light from the ellipsoidal reflector is blocked by the discharge vessel through which the laser beam passes to the discharge vessel.

Description

technical field [0001] The present invention relates to a light source device incorporated in an exposure device used in the manufacturing process of semiconductors, liquid crystal substrates, and even color filters. Background technique [0002] In the manufacturing process of semiconductors, liquid crystal substrates, and color filters, shortening of processing time and collective exposure of large-area processing objects are required. In response to this demand, a high-pressure discharge lamp with a large input power capable of injecting a greater ultraviolet radiation intensity has been proposed. [0003] However, if the input power to the high-pressure discharge lamp is increased, the load on the electrodes increases, and evaporation from the electrodes becomes a cause, causing blackening of the high-pressure discharge lamp and shortening the life of the high-pressure discharge lamp. [0004] Figure 13 It is a figure which shows the light source device described in th...

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Problems solved by technology

But when Figure 15 and Figure 16 In the structure shown, the reflectors 206 and 208 must have wavelength selectivity, which may be difficult to manufacture and cannot reliably split the wavelength

Even, in the reflector 206, a part of the radiated light is absorbed by the reflector 206, and on the reflector 208, a part of the radiated light is also absorbed by the reflector 208, and there is a problem that the radiated light cannot be efficiently utilized.

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