Air-conditioning cabinet and air cleaning device

Abstract

The invention discloses an air-conditioning cabinet and an air cleaning device. In the invention, a cleaning cabin of the air cleaning device is provided with a row of water inlet pipes with spray nozzles facing the direction of an air outlet on the side close to an air inlet and a row of water inlet pipes with spray nozzles facing the direction of the air inlet on the side close to the air outlet. Because the spraying directions of the spray nozzles of the two rows of water inlet pipes are opposite to one another along an air flow path, a dead spot without floating sprays basically does not exist on a path from the air inlet to the air outlet; and therefore, the airflow rate which is not cleaned by the sprays and flows from the air outlet to a dust-free room is reduced, and the air cleaning efficiency is improved. Furthermore, in order to make the sprays adsorb sulfides effectively, the air cleaning device provides a detailed overall amount of circulating water driven by a booster pump to determine a reasonable spraying amount of each spray nozzle so as to ensure that the sprays contain a maximum amount of water particles easier to adsorb the sulfides in the air and further improve the air cleaning efficiency.

Description

technical field [0001] The invention relates to air conditioning technology, in particular to an air conditioning unit (MAU) and an air cleaning device. Background technique [0002] Part of the process in semiconductor processing needs to be completed in a clean room. The dust-free mentioned here mainly means that the sulfide content in the air should be kept at about 0.75 nanograms per liter (ng / l) as much as possible. [0003] However, the actual sulfide content in the air is usually between 20 and 40ng / l. Therefore, in order to keep the clean room clean, it is necessary to clean it with water mist from the air conditioning box before it flows into the clean room. . [0004] Existing air conditioners used for semiconductor processing generally include a temperature regulating device and an air cleaning device communicating with the temperature regulating device and cleaning the air with water mist. [0005] Such as figure 1 As shown, the air cleaning device in the exis...

AI Technical Summary

Problems solved by technology

[0009] In the existing air conditioning box such as figure 1 Although the air cleaning device shown can clean the external air, all the water mist nozzles 100 in the air cleaning device are facing the direction of the air inlet 11, so that there is no dead angle in the cleaning chamber 10 where there is no floating water mist. , so that part of the external air flows into the clean room through the air outlet 12 without being cleaned by water mist; moreover, in the prior art, there is no reasonable explanation for how to make the water mist effectively absorb sulfide and provide the drive for the booster pump 101 total circulating water

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