Novel grating accelerometer

Abstract

The embodiment of the invention provides a novel grating accelerometer, which can form multiple-beam interference between a grating gap and two reflectors by arranging a reflector on the bottom of a sensitive mass block and also arranging a reflector on the bottom of a grating. Therefore, by improving the optical structure of the accelerometer, the optical sensitivity is improved so as to improvethe measuring accuracy of the accelerometer, reduce the requirement for the sensitivity of the mechanical structure of the accelerometer, be beneficial for improving the natural frequency and the impact resistance of the mechanical structure and reduce the processing difficulty of the accelerometer.

Description

technical field [0001] The invention relates to the field of accelerometers, in particular to a novel grating accelerometer. Background technique [0002] At present, the accelerometer is an important mechanical sensor, which is widely used in transportation, military affairs, geographical detection, etc. With the application of optical methods in measuring micro-displacement and micro-acceleration, the sensitivity of the accelerometer has been freed from the capacitance. The limit has been greatly improved. [0003] In the prior art, the grating accelerometer is based on the light intensity type grating displacement sensor, and its basic components are light source, grating sensing head and photoelectric conversion element. Its working principle is: when the acceleration acts on the vibration of the grating accelerometer When the diaphragm is installed, the length of the cavity changes, thereby changing the light intensity of the detected order; then the acceleration is de...

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Problems solved by technology

[0004] However, in the structure of the above-mentioned prior art, since the reflective surface will be inclined or bent when the gap changes, the quality of the diffraction spot will be affected, thereby reducing the measurement accuracy of the accelerometer; at the same time, due to the need to achieve high sensitivity, The sensitivity of the mechanical structure is very high, which will easily reduce the natural frequency of the mechanical structure and reduce the frequency range of the test. At the same time, it also reduces the stability and impact resistance of the mechanical structure and increases the difficulty of processing.

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