Diaphragm type heat-flow density sensor and manufacturing method thereof

A technology of heat flux density and manufacturing method, which is applied to calorimeters, thermometers and instruments using directly heat-sensitive electric/magnetic elements, etc., can solve the problems of high cost, low reliability and low precision of heat flux density sensors, and achieve Great practical application value, low cost and high precision effect

Inactive Publication Date: 2010-09-01
CHINA AIRPLANT STRENGTH RES INST
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Problems solved by technology

[0012] Purpose of the present invention: In order to solve the problems of high cost, low reliability and low precision of heat f

Method used

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  • Diaphragm type heat-flow density sensor and manufacturing method thereof
  • Diaphragm type heat-flow density sensor and manufacturing method thereof
  • Diaphragm type heat-flow density sensor and manufacturing method thereof

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Embodiment Construction

[0040] The present invention will be described in further detail below by means of specific embodiments:

[0041] Please also see figure 2 and image 3 ,in figure 2 It is a schematic diagram of the appearance of a preferred embodiment of the thin-film heat flux sensor of the present invention, image 3 Yes figure 2 top view diagram. Wherein, the thin-film heat flux sensor of the present invention includes a substrate 5 , a first thermal resistance material 6 , a second thermal resistance material 7 , thermal electrodes A8 , thermal electrodes B9 , and lead wires 13 . The base 1 is a heat-resistant material with a certain thickness. In this embodiment, the water-cooled plate is made of metal material. Of course, it can also be other common heat-resistant materials, as long as it can prevent heat flow transmission.

[0042] see again Figure 4 ,actually image 3 side view. The thermode A and thermode B are two kinds of standard thermode materials, the two are sputtere...

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Abstract

The invention relates to a heat flow density sensor, in particular to a diaphragm type heat-flow density sensor and a manufacturing method thereof. The diaphragm type heat-flow density sensor comprises a substrate, a first thermal resistant material, a second thermal resistant material, a thermoelectric pile consisting of a thermode A and a thermode B, and an outgoing line; the thermode A and the thermode B are mutually staggered to form the thermoelectric pile; and the thermal resistant materials are covered on the thermoelectric pile, and the thickness of the thermal resistant material on a high temperature end of the thermoelectric pile is smaller than that of the thermal resistant material on a low temperature end of the thermoelectric pile. In the diaphragm type heat-flow density sensor and the manufacturing method thereof, the thermode A and the thermode B are manufactured directly on the substrate of the thermal resistant material in a mode of vacuum ion sputtering, and a thermo electromotive force is measured through the thermoelectric pile formed by connecting the thermocouples in series, so the diaphragm type heat flow density sensor and the manufacturing method thereof have the advantages of high efficiency, lower cost, simple manufacturing, convenient measurement of a heat flow value, higher accuracy and larger practical application value.

Description

technical field [0001] The invention relates to a heat flux sensor, in particular to a thin-film heat flux sensor and a manufacturing method. Background technique [0002] The heat flux density sensor is mainly used for the measurement of radiation heat flux intensity, which can be used for both pure radiation heat flux measurement and compound heat flux measurement including radiation and convection. Thin-film heat flux sensors are passive devices based on the thermopile principle. see figure 1 , which is a schematic diagram of the principle of a thin-film heat flux sensor. When irradiated by the heat flow 1 perpendicular to the measuring surface, the thermal resistance layer 2 will absorb part of the energy and develop into a temperature gradient. At this time, the low temperature end 3 and the high temperature end 4 of the thin film heat flux density sensor are arranged alternately in the thermal resistance layer 2 . According to Fourier's law, the heat flux through th...

Claims

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Application Information

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IPC IPC(8): G01K17/00G01K17/08G01K7/22
Inventor 郝庆瑞
Owner CHINA AIRPLANT STRENGTH RES INST
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