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Method for marking sequence number of scanning lines and mask plate

A scanning line and mask technology, applied in the field of liquid crystal displays, can solve the problem of inability to accurately locate pixels and other problems

Inactive Publication Date: 2010-09-15
BEIJING BOE OPTOELECTRONCIS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] In the process of producing large-sized liquid crystal panels in the current production line, the inventors found that there are at least the following problems in the prior art: since a certain local exposure area of ​​the mask needs to be used multiple times in order to complete the exposure process of the entire substrate, if At this time, the digital pattern is directly set on the mask plate, which will cause the same serial number to be formed in the same partial exposure area of ​​the mask plate, which will cause the serial number of the data scanning line to be cyclically repeated, and cannot be formed in different areas. Different serial numbers of data scanning lines, when the size of the LCD panel is large, there is no way to accurately locate the pixel points through the serial numbers of data scanning lines

Method used

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  • Method for marking sequence number of scanning lines and mask plate
  • Method for marking sequence number of scanning lines and mask plate
  • Method for marking sequence number of scanning lines and mask plate

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Experimental program
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Embodiment 1

[0036] The scanning line serial number labeling method provided by the embodiment of the present invention can be used not only for the labeling of the gate scanning line serial number, but also for the labeling of the data scanning line serial number. The method for marking the serial number of the data scanning line while making the gate scanning line will be described in detail below in conjunction with the accompanying drawings, and the photoresist used in this embodiment is a positive photoresist.

[0037] First, if Figure 4 As shown, a gate metal layer 11 is deposited on a large-sized glass substrate 10 , and then a photoresist 12 is coated on the gate metal layer 11 .

[0038] Due to the large size of the glass substrate 10, the above-mentioned photoresist 12 needs to be exposed in different regions, and the mask used in it is as follows: Figure 5 As shown, the mask plate includes a partial exposure area 4, a partial exposure area 5 and a partial exposure area 6, and...

Embodiment 2

[0069]The scanning line serial number labeling method provided by the embodiment of the present invention can be used not only for the labeling of the gate scanning line serial number, but also for the labeling of the data scanning line serial number. The method for marking the serial number of the data scanning line during the process of manufacturing the data scanning line will be described in detail below in conjunction with the accompanying drawings, and the photoresist used in this embodiment is a positive photoresist.

[0070] Its specific labeling process is similar to that of Example 1, except that after the source / drain metal layer is fabricated, photoresist is coated on the source / drain metal layer, and then exposed through a mask, which corresponds to the data A light blocking block is provided at a position beside the scanning line, so as to form a photoresist reserved area on the photoresist.

[0071] Then use the method in Embodiment 1 to code the photoresist res...

Embodiment 3

[0079] An embodiment of the present invention provides a mask, including a light-transmitting substrate, on which a pattern area forming a scan line is provided, and the pattern area includes a photoresist reserved for forming a line number next to the corresponding position of the scan line. The pattern of the pattern, and the pattern of the photoresist reserved area next to the corresponding position of the scanning line.

[0080] If a positive photoresist is used to carry out the mask patterning process, the above-mentioned pattern forming the photoresist reserved area is a light-shielding block, and the above-mentioned pattern forming the photoresist reserved pattern of the line number is a light-shielding pattern, as detailed below Detailed description of mask patterning process using positive photoresist

[0081] That is to say, a light-shielding block and a line numbering pattern with light-shielding properties are designed in the corresponding area next to the scanning...

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PUM

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Abstract

The embodiment of the invention discloses a method for marking a sequence number of scanning lines and a mask plate, which relate to the technical field of liquid crystal displays and solve the problem that when the size of a liquid crystal panel is large, a pixel point cannot be positioned accurately through the sequence number of the data scanning lines. The method comprises the following steps of: when exposing photoresist, forming a line-numbering photoresist reserving pattern and a photoresist reserving region beside the corresponding position of each scanning line; marking at the photoresist reserving region to form a region-numbering photoresist reserving pattern; performing developing treatment on the exposed and marked photoresist and etching the metal exposed after the developing treatment; and stripping the residual photoresist to expose the line number and the region number. The embodiment of the invention is mainly applied to the production of liquid crystal panels, in particular the production of the large-size liquid crystal panels.

Description

technical field [0001] The invention relates to liquid crystal display technology, in particular to a method for marking scanning line numbers and a mask plate. Background technique [0002] The data scanning lines and gate scanning lines on the thin-film transistor (TFT) array substrate generally need to be numbered, so that the data scanning lines and gate scanning lines can be identified during the production process, and each pixel can be accurately located in the subsequent maintenance process. . [0003] At present, the method of marking the serial number of the data scanning line is as follows: digital graphics are provided on the mask plate used in the mask patterning process of the gate scanning line, and these digital graphics need to be pre-designed next to the subsequent data scanning lines , and the digital part is opaque, so that a metal digital pattern can be formed on the layer where the gate scanning line is located. Since the formed digital pattern is cor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1362H01L21/84G03F1/00G03F7/20
Inventor 吕敬
Owner BEIJING BOE OPTOELECTRONCIS TECH CO LTD