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CMOS/MEMS compatible spectroscopic gas sensor

A gas sensor and spectrum technology, applied in the field of a gas sensor, can solve the problems of weak anti-interference ability, easy poisoning of the sensor, high false alarm rate, and achieve fast response, good repeatability and consistency, and long life. Effect

Active Publication Date: 2011-11-09
新疆中科丝路物联科技有限公司
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Problems solved by technology

[0005] In order to solve the problems of poor selectivity, low sensitivity, weak anti-interference ability, high false alarm rate, and easy poisoning of the existing gas sensor, the present invention provides a CMOS / MEMS compatible spectral gas sensor to meet the needs of people Requirements for High Precision Gas Analysis

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  • CMOS/MEMS compatible spectroscopic gas sensor
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  • CMOS/MEMS compatible spectroscopic gas sensor

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the analysis of benzene vapor in ambient gas as a specific example and with reference to the accompanying drawings.

[0027] Such as figure 1 as shown, figure 1 The structural diagram of the CMOS / MEMS compatible spectral gas sensor provided by the present invention, the sensor is mainly composed of an infrared red source 1, a photonic crystal dispersion prism 2, a measuring gas chamber 3, a reference gas chamber 4, and a measuring gas chamber infrared photoelectric detection array 5 and the infrared photoelectric detection array 6 of the reference gas chamber.

[0028] Infrared light source 1 is a diode integrated on a (110) silicon substrate. The diode has a stable infrared radiation output at 0-5 μm. The infrared light emitted by the luminescent tube passes through a pair of 5 μm deep and ...

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Abstract

The invention discloses a CMOS / MEMS compatible spectroscopic gas sensor which performs qualitative and quantitative analysis by using near-infrared transmission spectra of gases to be measured. The sensor consists of an infrared light source, a photon crystal dispersing prism, an infrared photoelectric detection array and the like, judges the type of gases by adopting the reference structure and analyzing the position of the characteristic line and determines concentration of gases by corresponding absorbance. The invention overcomes the deficiencies that the traditional MEMS gas sensor has complex processes and short service life, has the high sensitivity detectivity and can be manufactured compatible with CMOS processes. The CMOS / MEMS compatible spectroscopic gas sensor can be produced in large scale with reduced cost and analyze the gas concentration gradient through the integrated array.

Description

technical field [0001] The invention relates to a gas sensor, in particular to a CMOS / MEMS compatible spectral gas sensor. The sensor uses the characteristics of the near-infrared transmission spectrum of the gas to judge the gas type, and determines the gas content by measuring the absorbance, so as to solve the problem of existing gas Sensitive sensors have low sensitivity, limited life, and no vector detection capability. They are also compatible with CMOS processes, can be mass-produced, are easy to reduce costs, and are widely used. Background technique [0002] With the development of science and technology and the progress of the times, people have higher and higher requirements for timely and accurate monitoring of the gas environment. Traditional gas sensors are large in size, high in power consumption, low in sensitivity, poor in performance consistency, inconvenient to use and high in cost, and are difficult to promote. MEMS gas sensor inherits the advantages of ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/17G01N21/35G01N21/3504G01N21/359
Inventor 景玉鹏高超群
Owner 新疆中科丝路物联科技有限公司
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