Two-axis accelerometer based on SOI technology

A biaxial accelerometer and sensitive mass technology, applied in the direction of measurement of acceleration, velocity/acceleration/shock measurement, film technology, etc., can solve the problems of poor stability, low yield and low precision of accelerometers, and reduce difficulty, Small size, high resolution effect

Inactive Publication Date: 2010-09-22
鲍路路
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a comb-tooth capacitive dual-axis accelerometer based on SOI silicon chips to solve the problems of poor stability, low precision, difficult processing, and low yield of accelerometers in traditional technologies.

Method used

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  • Two-axis accelerometer based on SOI technology
  • Two-axis accelerometer based on SOI technology
  • Two-axis accelerometer based on SOI technology

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Embodiment Construction

[0024] Such as figure 1 shown. The comb-tooth capacitive dual-axis accelerometer includes an insulating substrate 1, the material of which is the back substrate of an SOI silicon wafer, and a sensitive mass 2 with a symmetrical shape to the center is arranged on the insulating substrate 1, and the material of the sensitive mass 2 is The conductive silicon on the top layer of the SOI silicon wafer is made by the MEMS process, and the fixed comb teeth 3, 4, 5, 4, and 6. The fixed combs 3, 4, 5, 6 are parallel to the corresponding perimeter of the sensitive mass 2, symmetrical to each other along the center, between each perimeter of the sensitive mass 2 and the corresponding fixed combs 3, 4, 5, 6 There are also multiple groups of movable comb teeth 7, 8, 9, 10, and the distance ratio of the movable comb teeth 7, 8, 9, 10 to the fixed comb teeth on its adjacent two sides is 1: 10. The teeth are parallel to the periphery of the corresponding sensitive mass 2, and are connected ...

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Abstract

The invention relates to a comb-teeth capacitive type two-axis accelerometer based on an SOI technology, comprising an insulating substrate; the insulating substrate is provided with a sensitive mass block; fixed comb teeth which are fixed on the insulating substrate by an oxidation layer in the middle of an SOI silicon wafer are respectively arranged at the periphery of the sensitive mass block; a movable comb tooth is also arranged between each peripheral edge of the sensitive mass block and the corresponding fixed comb tooth; the four corners of the sensitive mass block are also respectively connected with four supporting frames; and the four supporting frames are distributed at the periphery of the sensitive mass block in a central symmetry way, and the other ends of the four supporting fames are connected to an anchorage zone. The comb-teeth capacitive type two-axis accelerometer has small volume and light weight, and can realize two-dimensional accelerate measurement with high sensitivity and high resolution.

Description

technical field [0001] The invention relates to the field of micromechanical sensors, in particular to a comb-tooth capacitance type biaxial accelerometer. Background technique [0002] An accelerometer is an inertial sensor capable of measuring the acceleration force of an object. The acceleration force is the force acting on the object when the object is accelerating. The acceleration force can be a constant, such as gravity, or it can be a variable. MEMS accelerometers are accelerometers manufactured using MEMS technology. Due to the use of micro-electro-mechanical system technology, the size of the accelerometer is greatly reduced, and a MEMS accelerometer is only a fraction of the size of a fingernail. MEMS accelerometers have the advantages of small size, light weight, and low energy consumption. [0003] MEMS accelerometers with mature technology can be divided into four types: piezoelectric, piezoresistive, capacitive, and thermal. Among them, the capacitive micr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125B81B7/02B81C5/00
CPCG01P2015/082
Inventor 鲍路路
Owner 鲍路路
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