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Transfer apparatus for wafer cassette

A transfer device and wafer box technology, applied in the field of wafer box devices, can solve problems such as low production capacity and inability to build automatic systems

Inactive Publication Date: 2010-09-29
HANMI SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, this conventional wafer handler has several problems, that is, its productivity is low (WPH: wafers per hour), and an automatic system that automatically cooperates with other wafer equipment cannot be constructed

Method used

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  • Transfer apparatus for wafer cassette
  • Transfer apparatus for wafer cassette
  • Transfer apparatus for wafer cassette

Examples

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Embodiment Construction

[0017] Reference will be made in detail to this particular embodiment of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.

[0018] Figures 1 to 3 The diagram illustrates a wafer cassette transfer device 100 according to a preferred embodiment of the present invention, which includes: a horizontal moving block 120, which is installed on a base (not shown in the figure) in a horizontally moving manner, It is moved in the X-axis direction by a well-known linear moving unit having a ball screw (not shown), an electric motor (not shown) and a guide member 180; a rotatable block 130 whose Rotatably mounted on the horizontally movable block 120 for rotation around an axis (Z axis) perpendicular to the horizontally movable block 120; a lifting block 140 mounted on the rotatable block in a vertically movable manner 130, for moving in th...

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PUM

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Abstract

The invention provides a transfer apparatus for a wafer cassette, used for converting the wafer cassette with a plurality of wafers from the horizontal position to a vertical position, and transferring the wafer cassette to a designated processing position. The apparatus comprises a wafer cassette loading platform mounted to rotate at an angle around a horizontal hinge axis for arranging the wafer cassette thereon from the outside of the apparatus, a clamping unit used for fixing or releasing the wafer cassette arranged on the wafer cassette loading platform, and a platform rotating unit for rotating the wafer cassette loading platform at an angle around the hinge axis back and forth so as to make the wafer cassette loading platform in a vertical position or a horizontal position, thereby the wafer cassette in a horizontal position transferred from the outside machine is allowed to be directly guided to a wafer processor, an automatic system connected with the external equipment is easily built, thereby the wafer cassette transfer speed and operating efficiency can be improved.

Description

technical field [0001] The present invention relates to an apparatus for transferring wafer cassettes containing wafers therein, and more particularly to an apparatus for transferring wafer cassettes in a wafer handler for converting a wafer cassette received from the outside from a horizontal position to Vertical position, and transfer the wafer cassette to the designated processing position. Background technique [0002] In microelectronics, wafers of semiconductor material are used as substrates for the production of microelectronic components. For example, as suitable materials, there are II / VI compound semiconductors, III / V compound semiconductors, and elemental semiconductors such as germanium, silicon, and the like. [0003] The semiconductor wafers are manufactured by cutting a single cylindrical crystalline semiconductor ingot into ingot elements of lengths of a few centimeters or tenths of a centimeter. The ingot elements are then individually cut into thin wafer...

Claims

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Application Information

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IPC IPC(8): H01L21/677
CPCH01L21/67718H01L21/6773Y10S414/141
Inventor 郑显权闵先永
Owner HANMI SEMICON CO LTD