Retainer and substrate storing container

Abstract

Provided is a retainer which suppresses contamination and damages due to rotation of a substrate, eliminates possibilities of removal and breakage of the substrate by reducing a shock operated to the substrate and facilitates operation of attaching a cover body having the retainer to a container main body. A substrate storing container is also provided. A retainer (20) is composed of a frame body (21) mounted on the rear surface center section (13) of the cover body (10) of the substrate storing container; a pair of first elastic pieces (29), which protrude from a pair of facing pieces (22) of the frame body (21) to be close to each other; and a second elastic piece (31), which is supported by bent free end sections (30) of the pair of first elastic pieces (29) for holding a semiconductor wafer (W). On the outside closer to the facing pieces (22) of the frame body (21) than the free end sections (30) of the first elastic pieces (29), outer end sections (32) of the second elastic piece (31) are positioned. On the second elastic piece (31), a plurality of first and second holding sections (33, 34) for holding the front periphery of the semiconductor wafer (W) are arranged at an interval. The second holding section (34) is positioned closer to the outer end section (32) of the second elastic piece (31) than the first holding section (33).

Description

technical field [0001] The present invention relates to a holder and a substrate storage container for holding a substrate composed of a semiconductor wafer, a glass wafer, or the like. Background technique [0002] Although not shown, conventional substrate storage containers are configured to include: a box-shaped container main body with its front open, which stores a plurality of semiconductor wafers as circular precision substrates in an aligned manner; The open front part of the container main body is opened and closed by manual operation or automatic operation; and a large holder fitted deeply on the back surface of the cover body opposite to the semiconductor wafer, the holder passes through a pair of holding parts The front peripheral edge of the semiconductor wafer is held (see Patent Documents 1 and 2). The holder has an elastic member extending in the left-right horizontal direction, and a pair of left and right holding portions for holding the front peripheral ...

AI Technical Summary

Problems solved by technology

In particular, when there is a difference in the holding force of the left and right holding parts, the semiconductor wafer may be easily rotated. When the semiconductor wafer is rotated, the holding part with the holder is ground to generate particles, or cause contamination or surface damage of the semiconductor wafer. The problem

[0008] In order to solve the above-mentioned problems, if it is intended to increase the holding force of the holder to limit the rotation of the semiconductor wafer, a large resistance will be generated when the cover body is fitted on the front part of the container body, so it exceeds the cover of the automatic detachable cover body. The specifications of the automatic body opening and closing device made it difficult to fit the lid body to the container body.

[0009] In addition, the existing holder is limited to simply holding the front peripheral edge of the semiconductor wafer by the holding portion of a single elastic member, so vibration or impact when the substrate storage container is transported, or a large impact when it is dropped In the case of a semiconductor wafer, it is difficult to absorb the impact, and there is a possibility that the semiconductor wafer will be detached from the holding part of the elastic member, or the semiconductor wafer may be damaged

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