Vacuum evaporation device

Abstract

The invention provides a vacuum evaporation device. The device comprises a transmission mechanism, an evaporation mechanism, a sense control device and a vacuum mechanism, wherein the transmission mechanism comprises a main cavity, gates, a transmission component and a driver; both sides of the main cavity are provided with chokes; the gates are arranged at the chokes; the bottom of the main cavity is provided with a connection port; the driver is connected with the gates and transmission component; the driver drives a substrate to move on the transmission component; the evaporation mechanismcomprises an auxiliary cavity, a baffle plate, a power component, an evaporation boat and an evaporation source; the evaporation boat is arranged in the auxiliary cavity; the evaporation source is arranged in the evaporation boat; the connection port of the main cavity opposite to the auxiliary cavity is provided with a joint port; the baffle plate is arranged between the connection port and the joint port; the sense control device comprises a sensor and a controller; the controller is electrically connected with the transmission component and the evaporation boat; the vacuum mechanism comprises a roughing pipeline, a vacuum pump and a gate valve; the roughing pipeline is communicated with the auxiliary cavity; and the roughing pipeline is connected with the vacuum pump.

Description

technical field [0001] The invention relates to auxiliary equipment in the organic light emitting diode production industry, in particular to a vacuum evaporation device for coating a substrate in the organic light emitting diode industry. Background technique [0002] With the continuous development of the economy, the continuous advancement of science and technology and the decrease of world energy, people pay more and more attention to energy conservation and utilization efficiency in production, so that the harmonious development of man and nature can meet the requirements of China's new industrialization road. [0003] In the display industry of digital products, in order to save energy and reduce production costs, enterprises have increased investment in research and development, and are constantly pursuing new energy-saving products. Among them, OLED display screen is a new product in digital products. OLED is Organic Light-Emitting Diode (Organic Light-Emitting Diode...

AI Technical Summary

Problems solved by technology

Due to the large difference in the direction of the vapor during the evaporation process of the existing spot evaporation technology, it is easy to cause the uniformity of the film thickness to deteriorate

To improve the uniformity of film thickness, the known technical solution is to continuously rotate the substrate to be coated, and the rotation of the substrate will involve the alignment of the mask, which makes the structural design of the evaporation processing device relatively complicated. And the uniformity of film thickness is also difficult to effectively guarantee

For the line evaporation technology, compared with the point evaporation technology, the uniformity of the film thickness will be improved to a certain extent, but the known traditional line evaporation technology needs to be moved for loading in order to improve the precision of the evaporated film layer. The evaporation boat of the evaporation source further requires additional configuration, such as sliding rails for the evaporation source to move, so the volume of the line evaporation device is relatively large, which increases the cost of the line evaporation device and also occupies the construction cost of the clean room

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