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Heat-preservation cylinder for single crystal furnace and single crystal furnace with same

A heat preservation cylinder and single crystal furnace technology, which is applied in the direction of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problems of heat waste and low heat reflectivity of heat preservation cylinder materials, so as to reduce production costs and solve heat waste , The effect of reducing thermal power consumption

Inactive Publication Date: 2010-11-17
王敬
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, the purpose of the present invention is to at least solve one of the above-mentioned technical defects, especially to solve the problem of heat waste caused by the low heat reflectivity of the insulation tube material during the growth of materials such as single crystal silicon.

Method used

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  • Heat-preservation cylinder for single crystal furnace and single crystal furnace with same
  • Heat-preservation cylinder for single crystal furnace and single crystal furnace with same
  • Heat-preservation cylinder for single crystal furnace and single crystal furnace with same

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Embodiment Construction

[0021] The insulation cylinder usually used for single crystal furnace is composed of carbon felt material or carbon fiber insulation layer and graphite material support layer, and the insulation layer can be located inside or outside the support layer; The first layer is the insulation layer and the outer layer is the insulation cylinder of the support layer. In addition, there is a thermal insulation cylinder that integrates graphite material and thermal insulation material. For the sake of simplicity, in the present invention, the layers located inside the thermal insulation cylinder in the above-mentioned structure are collectively referred to as "inner layers", and the layers located on the outside are collectively referred to as "outer layers". In the case of a cartridge, it is also referred to as an "inner layer". It should be noted that the present invention can be applied no matter in the structure in which the thermal insulation layer is located on the inside or out...

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Abstract

The invention discloses a heat-preservation cylinder, which is used for a single crystal furnace. The heat-preservation cylinder is characterized in that: a heat reflection layer is formed on the inner side of an inner layer of the heat-preservation cylinder, and is made from a material which can reflect more heat incident onto the heat reflection layer than that incident onto the inner layer of the heat-preservation cylinder. The heat-preservation cylinder of the invention can effectively reflect the heat irradiated to the heat-preservation cylinder back into a furnace body again so as to solve the problem of heat waste to a certain extent and reduce heat power consumption. The invention further discloses the single crystal furnace with the heat-preservation cylinder.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to an insulation cylinder used in a single crystal furnace for growing single crystal materials and a single crystal furnace using the insulation cylinder. Background technique [0002] In the production process of single crystal silicon wafers for solar cells, electronic devices and circuits, single crystal furnaces are used to melt polycrystalline silicon raw materials in quartz crucibles, and silicon single crystals are drawn from silicon melts by Czochralski method. [0003] The existing single crystal furnace comprises: an upper furnace body; a lower furnace body, the lower furnace body matches with the upper furnace body and is movable longitudinally; a supporting device arranged in the lower furnace body, and the supporting device is provided with There is a crucible containing polysilicon raw material; at least one heater arranged on the outer periphery o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/14
Inventor 王敬
Owner 王敬
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