Large-caliber high-gradient optical mirror surface on-line measuring system

Abstract

The invention relates to a large-caliber high-gradient optical mirror surface on-line measuring system which comprises an optical fiber light source, a converging light path light split system, a replaceable measuring grating, a high-precision plane reflecting mirror, a large-caliber high-gradient optical mirror surface, a digital CCD (Charge Coupled Device) and a computer information processing system. In the invention, after light emitted out from a numerical aperture optical fiber light source passes through the measuring grating, a group of shadow fringes is generated, and after passing through the converging light path light split system and the high-precision plane reflecting mirror, the shadow fringes are projected onto the large-caliber high-gradient optical mirror surface and then reflected back by the large-caliber high-gradient optical mirror surface according to the original path; when the shadow fringes pass through the high-precision plane reflecting mirror and the converging light path light split system, another light path is generated, and a conjugate image of the light source is generated in the light path; after the conjugate image is acquired by the digital CCD, the conjugate image is transmitted to a computer and analyzed and processed by the computer information processing system; and the surface shape error of the large-caliber high-gradient optical mirror surface is worked out through comparing the deviations between the returned image and an ideal image.

Description

technical field [0001] The invention belongs to the technical field of advanced optical manufacturing and detection, and relates to an on-line detection system in the optical processing process, in particular to an on-line detection system for an optical mirror with a large diameter, a large relative diameter and a large error range. Background technique [0002] Large-scale optical instruments and equipment, whether in space or on the ground, have shown increasingly urgent needs in recent years. With the continuous development of science and technology, the diameter of the required optical components is getting larger and larger. The diameter of the main mirror of the next generation of astronomical telescopes reaches more than 30 meters. Not only that, the structure of the space requires that the relative diameters of these large-diameter optical mirrors Larger and steeper. The manufacture of these large-diameter optical mirrors requires corresponding detection technology...

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention is to provide a new in-situ measurement method for large-diameter and high-steep optical mirrors in order to effectively make up for the shortcomings of existing measurement methods such as three-coordinate measuring instruments and infrared interferometers. The system is simple to manufacture , its cost is low, far lower than the cost of three-coordinate measuring instrument and infrared interferometer; at the same time, this method also makes up for the limitation of three-coordinate measuring instrument caliber and inconvenient measurement, and effectively solves the problem of large-caliber high-steep The problem of real-time quantitative measurement of high-degree optical components in the process of processing, it not only broadens the dynamic measurement range of traditional interferometers, but also provides a comparative basis for some emerging large-error measurement methods such as infrared interferometers, and simplifies the measurement process. At the same time, it also increases the reliability of its data

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