Loudspeaker of micro-electro-mechanical system and electronic device
A technology of micro-electromechanical systems and electronic devices, which is applied in the field of loudspeakers, can solve the problems of reduced radiation angle, low loudness, and difficulty in forming light and thin planar speakers, and achieves the effect of small size and simple structure
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[0013] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0014] Please also refer to figure 1 and figure 2 , which is a MEMS speaker 200 provided by an embodiment of the present invention. The MEMS speaker 200 includes a substrate 210 , a plurality of heating units 220 , a plurality of spacers 230 between each heating unit 220 and the substrate 210 , and a signal input device 240 .
[0015] The material of the substrate 210 is generally doped n-type silicon or p-type silicon, and may also be intrinsic silicon. A plurality of acoustic holes 212 are formed on the substrate 210 by an etching method, and these acoustic holes 212 pass through the substrate 210 up and down. The etching method generally uses wet etching (Wet Etching), and can also use dry etching (Dry Etching), such as Inductively Coupled Plasma (ICP) or Reactive Ion Etching (RIE). )Wait. In this embodiment, the acoustic hole 212...
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