Preparation method for nano precious metal particle modified tin dioxide gas sensitive material
A technology of tin dioxide and gas-sensitive materials, applied in metal material coating technology, ion implantation plating, coating, etc., can solve the problems of shortening the preparation stage and increasing the scope of use, so as to achieve simple production process and prevent harmful Gas poisoning, the effect of preparing noble metal particle size controllable
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Embodiment 1
[0040] According to 0.3% platinum powder (weight percent), 0.2% rhodium powder (weight percent), add an appropriate amount of lanthanum-tin alloy powder, and the balance is aluminum powder. After mixing for 1 hour, put it into a ball mill jar of corundum material, Vacuumize, fill with argon, and carry out mechanical alloying under the protective atmosphere of argon. The rotation speed of the planetary high-energy ball mill is 800rad / min, the ball milling time is 10 hours, and the ball milling temperature is 200K; it is bidirectionally pressed in a steel mold to form a green body, and the green body forming pressure is 650MPa; it is put into a reaction synthesis furnace for sintering, and the reaction synthesis temperature is 1200K. The reaction synthesis oxygen atmosphere concentration is relatively high, and the reaction synthesis time is 2 hours. Using a glass substrate, vacuumize, the vacuum degree is about 10 -5 -10 -2 Pa, sputtering or deposition rate is 10 -2 g / s, the...
Embodiment 2
[0042] According to 0.1% platinum powder (weight percent), 0.1% rhodium powder (weight percent), 0.2% palladium powder (weight percent), add an appropriate amount of cerium aluminum alloy powder, and the balance is tin powder, after 1 hour mixing , placed in a corundum ball mill jar, vacuumed, filled with argon, and mechanically alloyed under an argon protective atmosphere. The rotation speed of the planetary high-energy ball mill is 1000rad / min, the ball milling time is 30 hours, and the ball milling temperature is 220K; it is bidirectionally pressed in a steel mold to form a green body, and the green body forming pressure is 450MPa; it is put into a reaction synthesis furnace for sintering, and the reaction synthesis temperature is 1300K. The reaction synthesis oxygen atmosphere concentration is relatively high, and the reaction synthesis time is 3 hours. Sputtering deposition is carried out for about 45 minutes, and a tin dioxide film with a thickness of about 30 microns is...
Embodiment 3
[0044] By 0.02% platinum powder (percentage by weight), 0.1% rhodium powder (percentage by weight), 0.2% palladium powder (percentage by weight), 3% silver powder (percentage by weight), add an appropriate amount of tin-cerium alloy powder, the balance It is tin powder. After mixing for 1 hour, put it into a ball mill jar made of corundum material, vacuumize it, fill it with argon gas, and carry out mechanical alloying under the protective atmosphere of argon gas. Planetary high-energy ball mill speed 1200rad / min, ball milling time 60 hours, ball milling temperature 220K; cold isostatic pressing forming: 200-400MPa; press forming into green body; put into reaction synthesis furnace for sintering, reaction synthesis temperature 1400K, reaction synthesis The concentration of oxygen atmosphere is relatively high, and the reaction synthesis time is 2 hours. Sputtering deposition is carried out for about 30 minutes, and a tin dioxide film with a thickness of about 20 microns is obt...
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