Composite micro wind turbine generator
A kind of wind power generator, composite technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electromechanical device, etc., can solve the problem of low generator output power, low conversion efficiency, It cannot meet the piezoelectric requirements of wireless sensor network nodes and other problems, and achieve the effect of increasing output power, simple structure, and convenient batch processing
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[0025] At the same time, based on the principle of piezoelectric effect and electromagnetic induction, the composite micro-wind generator that realizes electromechanical conversion is composed of micro-stents, micro-beams, piezoelectric structures, metal coils, permanent magnets and bases. The micro-beams are fixed on the micro-stents, and the piezoelectric The structure and metal coils are processed on the micro-beams, and the permanent magnets are fixed on the base. The following is a typical process for making a composite micro-wind turbine:
[0026] 1. Select a double-sided polished silicon wafer as the substrate 1, and grow S on the front and back of the substrate 1 simultaneously by oxidation or low-pressure chemical vapor deposition i o 2 Layer 2, such as figure 1 shown;
[0027] 2. Deposit Ti and Pt layers sequentially on the front side of the silicon wafer by magnetron sputtering, then apply photoresist, and perform photolithography once to form a photoresist patter...
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