Fuzzy control method and system for magnetic suspension molecular pump

A fuzzy control, molecular pump technology, used in pump control, non-variable displacement pumps, machines/engines, etc.

Active Publication Date: 2013-06-05
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is that in the current technology, it is impossible to automatically adjust the static current information of the radial magnetic bearing when the molecular pump realizes static levitation, the static current information of the axial magnetic bearing, and the rotor position change when the magnetic levitation molecular pump is running. Control parameters to ensure the stable operation of the magnetic levitation molecular pump

Method used

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  • Fuzzy control method and system for magnetic suspension molecular pump
  • Fuzzy control method and system for magnetic suspension molecular pump
  • Fuzzy control method and system for magnetic suspension molecular pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0121] Such as image 3 Shown is the schematic diagram of the automatic control of the magnetic levitation molecular pump. The mold of the magnetic levitation molecular pump of the present embodiment

[0122] Paste control methods include:

[0123] Information collection steps

[0124] The static current information of the radial magnetic bearing and the static current information of the axial magnetic bearing when the molecular pump achieves static suspension are detected by the detection device; the rotor displacement deviation and the change rate of the rotor displacement deviation when the molecular pump is working;

[0125] Fuzzy control steps

[0126] According to the static current information of the radial magnetic bearing and the static current information of the axial magnetic bearing, the installation angle α of the magnetic levitation molecular pump and the gravity factor of the radial magnetic bearing are estimated; the installation angle α of the molecular pum...

Embodiment 2

[0128] The fuzzy control method when the magnetic levitation molecular pump of this embodiment is installed at any position includes:

[0129] Steps of establishing fuzzy control database

[0130] A fuzzy control database with fuzzy control rules is established based on test data and expert knowledge base. Wherein, the fuzzy control data in the fuzzy control rule includes preset fuzzy molecular pump installation angle α information, preset fuzzy radial magnetic bearing gravity factor information, preset fuzzy rotor displacement deviation, preset fuzzy rotor displacement deviation change rate, Preset fuzzy radial magnetic axis bias current information, preset fuzzy axial magnetic axis bias current information and preset fuzzy PID parameter information;

[0131] When establishing the fuzzy control database, the preset fuzzy molecular pump installation angle α information, the preset fuzzy radial magnetic bearing gravity factor information, the preset fuzzy rotor displacement de...

Embodiment 3

[0373] The difference between this embodiment and Embodiment 2 is that the parameter calculation step also includes

[0374] Angular optimization steps

[0375] will pass F z and F 1 , and F z and F 2 The installation angle data obtained respectively are optimized through the following calculation formula to obtain a more accurate estimation of the installation angle

[0376] Among them, the F obtained by using multiple measurements z and F 2 Numerically calculated installation angle α i , and the F obtained from multiple measurements z and F 1 Numerically calculated installation angle α′ i Take the average for a more accurate estimate of the mounting angle

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Abstract

The invention relates to a fuzzy control method for a magnetic suspension molecular pump. The method comprises the following steps of: detecting radial magnetic bearing static current information and axial magnetic bearing static current information during static suspension of the molecular pump, and rotor displacement deviation and rotor displacement deviation change rate during the operation of the molecular pump by using a detection device; calculating a mounting angle alpha of the magnetic suspension molecular pump and a radial magnetic bearing gravity factor according to the radial magnetic bearing static current information and the axial magnetic bearing static current information; fuzzifying the mounting angle alpha of the magnetic suspension molecular pump, the radial magnetic bearing gravity factor, the rotor displacement deviation and the rotor displacement deviation change rate; inquiring a fuzzy control rule, performing fuzzy inference and performing defuzzification; outputting control radial magnetic bearing bias current information, control axial magnetic bearing bias current information and control proportion integration differentiation (PID) parameter information; and finishing control parameter setting so as to guarantee that the magnetic suspension molecular pump can work stably when being arranged at any position. The invention also provides a fuzzy control system using the fuzzy control method.

Description

technical field [0001] The invention belongs to a control method for fluid equipment installation, in particular to a fuzzy control method and a fuzzy control system of a magnetic levitation molecular pump. Background technique [0002] The magnetic suspension molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. Because the magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, long life, etc., the magnetic levitation molecular pump is widely used in the field of vacuum acquisition with high vacuum and high cleanliness. [0003] The load of the magnetic levitation molecular pump is shared by the radial magnetic bearing and the axial magnetic bearing. During the working process, the magnetic l...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D27/00
Inventor 张剀张小章李奇志邹蒙武涵
Owner TSINGHUA UNIV
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