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Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof

A carbon nanotube film, gas temperature technology, used in thermometers, thermometers using directly heat-sensitive electrical/magnetic components, measuring devices, etc. At 60 degrees Celsius, the breakdown voltage is also above 150 volts, etc., to achieve the effect of wide temperature measurement range and accurate measurement

Inactive Publication Date: 2012-11-28
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The breakdown voltage of the two-electrode sensor is as high as 360 volts when the temperature is 10 degrees Celsius, and the breakdown voltage is also above 150 volts when the temperature is 60 degrees Celsius. The working voltage is high, and there is no carbon nanotube film two-electrode gas temperature sensor

Method used

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  • Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof
  • Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof
  • Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof

Examples

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Effect test

Embodiment 1

[0036] Such as figure 2 , image 3 As shown, the carbon nanotube thin film ionization gas temperature sensor consists of three electrodes stacked one after the other from top to bottom. The three stacked electrodes are respectively provided with a first electrode 1, a second electrode 2 and a third electrode. Electrode 3, the first electrode 1 of which is composed of a metal film substrate 5 with a carbon nanotube thin film attached to the inner surface and an electrode 4 with air holes; the second electrode 2 is composed of a lead-out electrode plate with a lead-out hole in the center ; The third electrode 3 is composed of collectors with blind holes on the electrode plate surface; the three electrodes are separated from each other by insulating pillars 7 .

[0037] figure 2 In the shown embodiment of the carbon nanotube thin film ionization gas temperature sensor, there are two vent holes on the electrode surface of the first electrode 1, and the vent holes are circular;...

Embodiment 2

[0045] The basic structure of the sensor of this embodiment is the same as that of Embodiment 1, the difference is:

[0046] Among the three electrodes of the carbon nanotube film ionization gas temperature sensor, the distance between two adjacent electrodes is 170 μm, the first electrode 1 has two air holes, the second electrode 2 has one lead-out hole, and the third There is one blind hole for the electrode 3 .

[0047] Using the carbon nanotube film ionization gas temperature sensor with fixed electrode spacing, the single-value temperature characteristics in nitrogen were obtained experimentally ( Figure 5 As shown), the ion current value output by the sensor is input into the temperature measurement model established by data fusion, and the temperature measurement value in nitrogen with an accuracy of less than 1% is obtained.

[0048] Figure 5 In the embodiment shown in which the carbon nanotube thin film ionization gas temperature sensor detects the ambient tempera...

Embodiment 3

[0050] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that: among the three electrodes of the carbon nanotube film ionization gas temperature sensor, the electrode spacing between two adjacent electrodes is 250 μm and 30 μm respectively, and the first electrode 1 and the second electrode The area of ​​two electrodes and two plates facing each other is 0.01mm 2 , the area of ​​the plate facing the second electrode 2 and the third electrode 3 is 0.01mm 2 .

[0051] There is one vent hole on the electrode surface of the first electrode 1, and the vent hole is quadrilateral, pentagonal or hexagonal; the second electrode 2 has 4 center lead-out holes, and the lead-out holes are quadrilateral, pentagonal or hexagonal ; The number of blind holes in the third electrode 3 is 4, and the blind holes are 3-6 prisms or pyramids.

[0052] The temperature measuring method of the present embodiment is basically the same as embodiment 1, the dif...

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Abstract

The invention discloses a carbon nanotube film ionizing gas temperature sensor and a temperature measuring method thereof. The sensor comprises a first electrode, a second electrode and a third electrode distributed in turn, wherein the first electrode is provided with vents, and a metal film substrate provided with a carbon nanotube film is attached to the inner surface of the first electrode; the center of the second electrode is provided with lead-out holes; the third electrode is provided with blind holes; and the three electrodes are mutually isolated. The method comprises the following steps of: 1) arranging the gas temperature sensor; 2) applying voltage to electrodes; 3) measuring a value of ion current output by the sensor; 4) forming a sample by using the measured value and a gas temperature calibration value, and constructing a gas temperature measurement database with an interpolation value; 5) constructing a data fusion instrument, and establishing an accurate gas temperature measurement model; and 6) inputting the actually measured value of the sensor into the measurement model to obtain an accurate gas temperature measurement value. The sensor has low working voltage, and high sensitivity, good linearity and high accuracy of measuring gas temperature, and can be used for measuring temperature of inflammable, explosive and toxic gas.

Description

technical field [0001] The invention relates to the field of gas temperature detection, in particular to an ionization gas temperature sensor and a temperature measurement method based on carbon nanotube film and gas discharge principle. Background technique [0002] With the urgent need of gas detection in all walks of life and the development of nanotechnology, nanosensors have made great progress. Especially with the discovery of carbon nanotubes at the end of the 20th century, carbon nanotubes have shown attractive application prospects in the fields of gas, temperature and humidity detection. The carbon nanotube thin film two-electrode ionization sensor in the carbon nanotube temperature sensor has become a research hotspot in the field of gas temperature detection due to its advantages of high detection sensitivity, wide gas detection range, and fast response. The carbon nanotube film two-electrode ionization gas temperature sensor is based on the principle of gas dis...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/40
Inventor 张勇方静宋晓慧张晶园王影花王进姜为华张建业牛国平王晓冰李昕唐建文刘君华
Owner XI AN JIAOTONG UNIV