Novel spherical absolute measurement system and method thereof
An absolute measurement, a new type of technology, applied in the field of advanced optical detection, can solve the problems of high-precision inspection of difficult spherical surfaces, and achieve the effect of low realization, high measurement accuracy, and easy realization.
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[0036] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0037] figure 1 It is a schematic diagram of a new type of concave spherical surface absolute measurement system for concave spherical surface detection, image 3 It is a schematic diagram of a novel convex spherical surface absolute measurement system for convex spherical surface detection. The absolute measurement system for concave spherical surface and convex spherical surface detection of the present invention is identical in structure except for the standard objective lens 5 of the interferometer. Such as figure 1 with image 3 As shown, the new spherical absolute measurement system includes a computer 1, a light source 2, a spectroscopic unit 3, a filter 4, a standard objective lens 5, an imaging unit 6, a measur...
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