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Novel spherical absolute measurement system and method thereof

An absolute measurement, a new type of technology, applied in the field of advanced optical detection, can solve the problems of high-precision inspection of difficult spherical surfaces, and achieve the effect of low realization, high measurement accuracy, and easy realization.

Active Publication Date: 2011-06-15
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] To sum up, although there are many theoretical studies on high-precision spherical surface shape detection in foreign countries, these methods of absolute spherical surface detection have their own shortcomings, and it is difficult to be practically used for high-precision spherical surface inspection.

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  • Novel spherical absolute measurement system and method thereof
  • Novel spherical absolute measurement system and method thereof
  • Novel spherical absolute measurement system and method thereof

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Embodiment Construction

[0036] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0037] figure 1 It is a schematic diagram of a new type of concave spherical surface absolute measurement system for concave spherical surface detection, image 3 It is a schematic diagram of a novel convex spherical surface absolute measurement system for convex spherical surface detection. The absolute measurement system for concave spherical surface and convex spherical surface detection of the present invention is identical in structure except for the standard objective lens 5 of the interferometer. Such as figure 1 with image 3 As shown, the new spherical absolute measurement system includes a computer 1, a light source 2, a spectroscopic unit 3, a filter 4, a standard objective lens 5, an imaging unit 6, a measur...

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Abstract

The invention discloses a novel spherical absolute measurement system and a method thereof, wherein the system comprises a computer, a light source, a light splitting unit, a filter, a standard object lens, a measured spherical reflecting mirror, an electro-control translation stage and a data acquisition and transmission unit; the method comprises the steps of: at first, adjusting the confocal location of the measured spherical reflecting mirror on the standard object lens by the electro-control translation stage, controlling a Fizeau interferometer by the computer to perform surface detection on the measured spherical reflecting mirror once and then storing the detection data in the computer, then controlling the electro-control translation stage by the computer to enable the measured spherical reflecting mirror to generate, around the focal point, confocal shears of lambda y and lambda y in relation to an optical axis of the interferometer, and using the interferometer to perform two detections respectively and storing the detection data of the two detections in the computer, and separating the surface data of the measured spherical reflecting mirror from errors of system and reference surface by data processing software in the computer among the three detected surface data so as to obtain the absolute surface information of the measured optical mirror surface.

Description

technical field [0001] The invention belongs to the technical field of advanced optical detection, and relates to an optical detection system, especially a high-precision optical mirror absolute surface shape detection system and method. Background technique [0002] The rapid development of modern optical manufacturing industry is closely related to the continuous improvement and update of optical detection technology. The traditional optical interference detection is to use visual or photographic methods to estimate the interference fringes, and evaluate the surface error (wave aberration) of the detected wave surface or the imaging quality of the tested optical system according to the deformation of the interference fringes. Generally, the accuracy of visual estimation is λ / 10, and the estimated fringe deformation also includes the systematic error of the interferometer itself, which is not entirely the actual error of the detected surface. [0003] Fizeau-type Zygo inte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B9/023
Inventor 杨鹏伍凡侯溪万勇建
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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