Three-dimensional vector hydrophone

A three-dimensional vector, hydrophone technology, applied in instruments, measurement devices, radio wave measurement systems, etc., can solve problems such as unfavorable miniaturization, difficulty in mass production, etc., and achieve simple structure, low processing cost, easy production and batch production. The effect of chemical production

Inactive Publication Date: 2011-06-22
ZHONGBEI UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0015] The present invention provides a three-dimensional vector hydrophone in order to solve the problems existing in the existing combined three-dimensional vector hydrophone that are not conducive to miniaturization and difficult to produce in batches.

Method used

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Embodiment Construction

[0049] Such as figure 2As shown, the three-dimensional vector hydrophone includes sensitive units for sensitive underwater acoustic signals in the three directions of X, Y, and Z, which are processed by MEMS micromachining technology; The sensitive unit of the underwater acoustic signal in two directions is the same sensitive unit, including the semiconductor frame 1, the cross-shaped cantilever beam 2 erected in the center of the semiconductor frame 1, and the micro The columnar body 3, the four-beam ends of the cross-shaped cantilever beam 2 are respectively provided with strain-sensitive elements 4 (for example: piezoresistors, resonant tunneling diodes RTD, etc.), and the strain-sensitive elements 4 at the four-beam ends of the cross-shaped cantilever beam 2 Connect to form two full-bridge differential circuits for measuring underwater acoustic signals in X and Y directions respectively, such as Figure 4 , 5 As shown; the sensitive unit for sensitive Z-direction underw...

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Abstract

The invention relates to a vector hydrophone in the field of micro-electro-mechanical system (MEMS) sensors, in particular to a three-dimensional vector hydrophone, and solves the problems that the conventional combined three-dimensional vector hydrophone is unfavorable for realizing miniaturization, is difficult to produce in batches, and the like. The hydrophone comprises sensing units for sensing underwater acoustic signals in an X direction, a Y direction and a Z direction respectively, wherein the sensing unit for sensing the underwater acoustic signal in the Z direction comprises a semiconductor frame and two cantilever beams which are suspended in the semiconductor frame, are parallelly arranged and have equal length; single ends of the cantilever beams are fixed with the same border of the semiconductor frame, and free ends of the cantilever beams are fixed together through a connecting beam; the ends of the two cantilever beams fixed with the semiconductor frame are provided with a strain sensing element respectively; two reference sensing elements are arranged on the semiconductor frame and are connected to form a bridge circuit; and the semiconductor frames of the two sensing units are integrated on the same plane. The hydrophone has a simple and novel structure, is monolithically integrated, is easy to miniaturize, manufacture and produce in batches, and has a wide application range.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a three-dimensional vector hydrophone. Background technique [0002] According to the acoustic theory, any acoustic signal in the space can be decomposed into component signals in three directions of X, Y, and Z, such as figure 1 shown. The three components of particle velocity: [0003] v x = p ρ 0 c cos θ cos α [0004] v y = p ρ 0 c sin θ cos α - - - ( 1 ) [0005] v z = p ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H11/06G01S7/521B81B3/00
Inventor 张国军杨玉华何常德关凌纲石归雄熊继军张文栋许娇王晓瑶
Owner ZHONGBEI UNIV
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