Beam transmission system and method

Abstract

The invention discloses a beam transmission system, which comprises a beam jetting device and a target workpiece as a beam transmission terminal. A pair of parallel first rod-shaped quadrupole magnets positioned on the two sides of a beam path respectively is arranged between the beam jetting device and the target workpiece, the sum of the current values in the coils of the two first rod-shaped quadrupole magnets is kept at a first preset value, and the current value in the coil of each first rod-shaped quadrupole magnet constantly changes between a preset upper limit and a preset lower limit. The invention also discloses a beam transmission method realized by utilizing the beam transmission system. According to the invention, the intensity distribution and the angle distribution of the beam can be controlled by controlling the current values of one or two pairs of rod-shaped quadrupole magnets, so as to improve the beam utilization efficiency and further facilitate the optimization of the dose uniformity and the angle uniformity of the beam. Meanwhile, because of the focusing effect of the rod-shaped quadrupole magnets, the beam transmission efficiency is improved, and the beam intensity when the beam is transmitted to the workpiece is increased.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a beam transmission system and method. Background technique [0002] Transport control of ion or electron beams is required in many areas of manufacturing. For example, the ion implantation method is used to introduce atoms or molecules, which are usually called impurities, into the target substrate, thereby changing the properties of the substrate material. For example, metal bearings are introduced into other materials through ion implantation, which can improve their wear resistance and prolong their service life. The ion coating method is to deposit ionic materials on the surface of the workpiece, thereby changing the physical and chemical properties of the surface of the workpiece, such as the manufacture of optical devices or display equipment, it is necessary to adopt a thin film deposition process with controllable thickness and predetermined surface properties ...

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to overcome the defects in the prior art that the scanning and focusing of the beam cannot be simultaneously realized through a single beam optical device, and to provide a method for simultaneously realizing the scanning and focusing of the beam by using a rod-shaped quadrupole magnet. Beam delivery systems and methods

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