Electron cyclotron resonance ion source

Abstract

The invention provides an electron cyclotron resource ion source, in particular relates to a novel structured all-permanent magnet high-current electron cyclotron resonance (ECR) ion source capable of directly observing internal discharge of an ion source. In the electron cyclotron resource ion source, quartz glass with high light transmission is adopted as a discharge chamber; microwave leakage caused by the quartz glass can be shielded by a special structured metal shell which is arranged outside the quartz glass and provided with a window; and a magnetic field required by electron cyclotron is generated by a plurality of separated permanent magnetic rings, and a plurality of gaps are formed among the rings. Therefore, through the window of a shielding shell, gaps among the permanent magnetic rings and the transmitting quartz glass, the whole process occurring in the discharge chamber and various states of plasma can be observed in real time uninterruptedly at a plurality of angles in a plurality of positions, and diagnostic study on plasma spectrometry can be developed uninterruptedly.

Description

technical field [0001] The invention relates to an ion source, in particular to a novel structure full permanent magnet strong current electron cyclotron resonance (ECR) ion source which can directly observe the discharge process in the ion source. Background technique [0002] The electron cyclotron resonance (ECR) ion source with a frequency of 2.45 GHz has the ability to generate many types of ions (H + / D + / O + / he + / N + ), high beam intensity, good stability, high repeatability, long working life, and simple maintenance, etc., it has become the first choice for generating single-charged high-current ion beams in the world. This type of ion source system consists of several parts such as microwave system, discharge chamber, magnet and extraction system. Its working principle is that when the cyclotron frequency of the electrons orbiting the magnetic field lines in the discharge chamber is equal to the microwave frequency fed into the discharge chamber, the electro...

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Problems solved by technology

It is very inaccurate to obtain the plasma characteristics in the discharge chamber by using the extraction beam inversion method, because the size of the extraction beam is not only related to the parameters such as plasma density and temperature, but also severely restricted by the structure of the extraction system

Part of the plasma information can be obtained by introducing a probe or optical fiber into the discharge chamber, but the intervention of the probe brings disturbance to the plasma and destroys the original balance in the discharge chamber, so the data is inaccurate

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