Electron cyclotron resonance ion source

A technology of electron cyclotron resonance and ion source, applied in the field of ion source, can solve problems such as restraint, inaccurate data, and plasma disturbance

Inactive Publication Date: 2011-07-06
PEKING UNIV
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Problems solved by technology

It is very inaccurate to obtain the plasma characteristics in the discharge chamber by using the extraction beam inversion method, because the size of the extraction beam is not only related to the parameters such as plasma density and temperature, but also severely restricted by the structur

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  • Electron cyclotron resonance ion source
  • Electron cyclotron resonance ion source
  • Electron cyclotron resonance ion source

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Embodiment Construction

[0023] The present invention will be further described below by embodiment.

[0024] figure 1 It is a schematic diagram of the structure of the ion source provided by the present invention. refer to figure 1 According to the technical solution provided by the present invention, an ECR all-permanent magnet quartz discharge chamber ion source with a frequency of 2.45 GHz can be used to extract high-current ion beams and explore the plasma state in the discharge chamber without interference. The whole ion source mainly includes the following parts: BJ26 microwave system 1, water cooling hole 2, special ceramic microwave window 3, discharge chamber made of quartz material 4, microwave shielding shell 8, magnet composed of multiple permanent magnetic rings 7 , intake pipe 6, and three-electrode extraction system 5, etc.

[0025] Microwave system 1 includes: microwave power source, magnetron and base, circulator and water load, three-pin tuner, directional coupler, isolation wave...

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Abstract

The invention provides an electron cyclotron resource ion source, in particular relates to a novel structured all-permanent magnet high-current electron cyclotron resonance (ECR) ion source capable of directly observing internal discharge of an ion source. In the electron cyclotron resource ion source, quartz glass with high light transmission is adopted as a discharge chamber; microwave leakage caused by the quartz glass can be shielded by a special structured metal shell which is arranged outside the quartz glass and provided with a window; and a magnetic field required by electron cyclotron is generated by a plurality of separated permanent magnetic rings, and a plurality of gaps are formed among the rings. Therefore, through the window of a shielding shell, gaps among the permanent magnetic rings and the transmitting quartz glass, the whole process occurring in the discharge chamber and various states of plasma can be observed in real time uninterruptedly at a plurality of angles in a plurality of positions, and diagnostic study on plasma spectrometry can be developed uninterruptedly.

Description

technical field [0001] The invention relates to an ion source, in particular to a novel structure full permanent magnet strong current electron cyclotron resonance (ECR) ion source which can directly observe the discharge process in the ion source. Background technique [0002] The electron cyclotron resonance (ECR) ion source with a frequency of 2.45 GHz has the ability to generate many types of ions (H + / D + / O + / he + / N + ), high beam intensity, good stability, high repeatability, long working life, and simple maintenance, etc., it has become the first choice for generating single-charged high-current ion beams in the world. This type of ion source system consists of several parts such as microwave system, discharge chamber, magnet and extraction system. Its working principle is that when the cyclotron frequency of the electrons orbiting the magnetic field lines in the discharge chamber is equal to the microwave frequency fed into the discharge chamber, the electro...

Claims

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Application Information

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IPC IPC(8): H01J49/10H01J49/38
Inventor 彭士香袁忠喜任海涛吕鹏南郭之虞
Owner PEKING UNIV
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