Storage element and storage device
A storage element and storage device technology, applied in electrical elements, electric solid state devices, semiconductor devices, etc., can solve the problem of MRAM power consumption and other problems, and achieve the effects of improving resistance value retention performance, large capacity, and increasing times.
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[0075] Specific examples of the present invention will be described below.
[0076] With respect to the memory cell array 20 and the memory element 10 in the above-mentioned embodiment, different samples were fabricated to study their properties.
[0077]
[0078] First, if figure 2 and image 3 As shown, a MOS transistor Tr is formed on a semiconductor substrate 11 . Next, an insulating layer is formed to cover the surface of the semiconductor substrate 11, the insulating layer being formed with via holes. After that, the via hole is filled with an electrode material W (tungsten) by CVD (Chemical Vapor Deposition), and the surface of the resulting via hole is ground by CMP (Chemical Mechanical Polishing). Thereafter, by repeating such processes, the plug layer 15, the metal wire layer 16, and the lower electrode 1 are formed, and then the lower electrode 1 is patterned according to the memory cell. The lower electrode 1 was formed such that its aperture portion had a d...
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