Carbon dioxide ionized water foaming machine mixing unit

Abstract

The invention relates to the field of chip manufacturing and processing, and in particular relates to a carbon dioxide ionized water foaming machine for chip cleaning. The invention aims to provide a carbon dioxide ionized water foaming machine mixing unit which is of a simple structure and can effectively improve the ion concentration stability of the prepared ionized water. A carbon dioxide ionized water foaming machine mixing unit comprises a deionized water inlet, a secondary ionized water outlet, a primary ionized water inlet and a mixing cavity, wherein the mixing cavity is communicated with the deionized water inlet, the secondary ionized water outlet and the primary ionized water inlet respectively. The mixing unit provided by the invention is used as a secondary processing unit after the carbon dioxide ionized water is obtained, and facilitates the acquisition of the ionized water with a stable concentration; and moreover, bubbles in the ionized water can be released as much as possible after the processing of the mixing unit, and the chip cleaning operation is facilitated.

Description

technical field [0001] The invention relates to the field of chip manufacturing and processing, in particular to a carbon dioxide ionized water foaming machine used for chip cleaning. Background technique [0002] In chip manufacturing equipment, in order to prevent static electricity from damaging chips being processed, it is necessary to ionize deionized water to eliminate static electricity. At normal temperature, carbon dioxide can be partially dissolved in deionized water to produce hydrogen ions and carbonate ions to form ionized water. After the ionic water is dried, the ions therein become carbon dioxide and volatilize, so no impurities will remain on the processed chip. Therefore, carbon dioxide ionized water is widely used in various process steps of chip manufacturing. Due to the strict requirements on the purity of ionized water in chip manufacturing, mechanical means must not be used to promote the dissolution of carbon dioxide in water during the preparation ...

AI Technical Summary

Problems solved by technology

[0003] The ionized water obtained by the above-mentioned foaming machine comes directly from the mixing tee pipe of carbon dioxide and deionized water. The concentration of ionized water fluctuates greatly, and there are many bubbles in the ionized water, which is not conducive to being directly used for chip cleaning.

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