Unlock instant, AI-driven research and patent intelligence for your innovation.

Recovery device and film forming equipment equipped therewith

A recovery device and film-forming equipment technology, applied in the field of organic material recovery equipment, can solve problems such as inconvenience and waste of organic materials, and achieve the effects of wide use value, improved recovery, and convenient disassembly

Active Publication Date: 2013-12-11
XIAMEN TIANMA DISPLAY TECH CO LTD
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The general OLED process is to vapor-deposit organic materials on the panel at high temperature. However, most of the organic gases are easy to adhere to the walls of the cavity during the evaporation process, and only about 30% of the organic gases can adhere to the panel. waste of organic material
[0004] This shows that above-mentioned existing technology obviously still has inconvenience and defective, and needs to be further improved
In order to solve the above problems, related fields have tried their best to find a solution, but no applicable method has been developed for a long time.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Recovery device and film forming equipment equipped therewith
  • Recovery device and film forming equipment equipped therewith
  • Recovery device and film forming equipment equipped therewith

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0044] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

[0045] In order to make the description of the present invention more detailed and complete, reference may be made to the attached drawings and various embodiments described below, and the same numbers in the drawings represent the same or similar components. On the other hand, well-known components and steps have not been described in the embodiments in order not to limit the invention unnecessarily.

[0046] In the embodiments and claims, unless the article is specifically limited in the context, "a" and "the" can generally refer to a single or a plurality.

[0047] The description of “coupled with” herein may generally refer to a component being indirectly connected to another component through other components, or a component being directly connected to another component without passing through other components.

[0048] ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a recovery device and a film forming equipment equipped therewith. The film forming equipment comprises a film forming chamber, a material source arranged inside the film forming chamber, a detachable substrate arranged inside the film forming chamber and a cooling unit for controlling the temperature of the detachable substrate, so that the temperature of the detachable substrate is smaller than the temperature of the material source. The recovery device comprises a detachable substrate and a cooling unit for controlling the temperature of the detachable substrate. According to the invention, the recovery rate of organic material is effectively improved and organic material is convenient in recovery and recycling.

Description

technical field [0001] The invention relates to an organic material recovery device, in particular to a recovery device for effectively improving the recovery rate of collected organic materials and a film forming device using the same. Background technique [0002] Organic Light Emitting Diodes (OLEDs) and Thin Film Transistor Liquid Crystal Displays (TFT-LCDs) are different types of products. OLED has the advantages of self-illumination, wide viewing angle, high contrast, low power consumption, high response rate, full-color, simple process, etc. The types of OLED displays can be divided into monochrome, multi-color and full-color and other types. [0003] The general OLED process is to vapor-deposit organic materials on the panel at high temperature. However, most of the organic gases are easy to adhere to the walls of the cavity during the evaporation process, and only about 30% of the organic gases can adhere to the panel. cause waste of organic material. [0004] Thi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56H01L51/50B01D5/00B01D53/00C23C14/24C23C14/12
CPCY02W30/50
Inventor 张耿志
Owner XIAMEN TIANMA DISPLAY TECH CO LTD