Zinc oxide micro/nano composite structure array film and preparation method thereof

Abstract

The invention discloses a zinc oxide micro / nano composite structure array film and a preparation method thereof. In the film, an ordered hexagonal single-layer sphere array is arranged on a substrate; each sphere consists of a dielectric sphere, and a gold film and a zinc oxide nano-stick / cone coated in sequence on the outer surface of the dielectric sphere; the outer diameter of the dielectric sphere is 1-30 mum; the thickness of the gold film is 5-50 mum; the stick / cone axis of the zinc oxide nano-stick / cone is vertical to a sphere center; the length of the stick / cone is 200-800 nanometers; the diameter of the stick / cone is 80-160 nanometers; and the taper of the cone is 3-30 degrees. The method comprises the following steps of: performing ion sputtering and gold film deposition on the substrate with a single-layer crystal template at the pressure of 5-10 Pa to obtain a gold film sphere array; putting the gold film sphere array in zinc oxide electrolyte with the temperature of 60-80 DEG C; and performing electrolytic deposition at the deposition current density of between -0.3 mA / cm<2> and -2.0 mA / cm<2> by adopting a three-electrode method for 30 minutes to 4 hours to obtain the zinc oxide micro / nano composite structure array film. The film can be widely applied to the fields of photoelectronic devices, surface microfluids, sensors and the like.

Description

technical field [0001] The invention relates to a micro / nano composite structure array film and a preparation method thereof, in particular to a zinc oxide micro / nano composite structure array film and a preparation method thereof. Background technique [0002] The micro / nano composite structure array film, which has the advantages of both microstructure array and nanostructure materials, has important application value because of its uniform surface, high activity, stable structure and strong coupling effect, and can be widely used in high activity, high stability and repeatability devices. For example, polystyrene microsphere / carbon nanotube composite structure array film has adjustable surface wetting behavior, and can realize surface superhydrophobic properties under specific conditions, which is more efficient than pure carbon nanotube film or ordered microsphere array. Excellent adjustable wetting properties. Another example: noble metal micro / nano composite structur...

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Problems solved by technology

However, both the two-dimensional ordered nanostructured metal material and its preparation method have deficiencies. First, the dielectric sphere and the outer package of the metal-wrapped dielectric sphere that constitute the two-dimensional ordered nanostructured metal material Although the thickness of the metal layer has a large size difference and the two are a composite structure, they still belong to the nanoscale rather than a micro / nano composite structure array. Similarly, the hollow structure of a two-dimensional ordered nanostructure metal material Metal spheres are both nano-sized and only have a single-shell structure, rather than a composite structure with different structures on the inner and outer layers, so that it is the same as a metal-wrapped dielectric sphere, which limits its possible superior performance and unique uses; secondly , whether it is a metal-wrapped dielectric ball or a hollow metal ball, the surface of the metal layer as the shell is too smooth, making it extremely difficult to have a high specific surface area, especially the metal layer cannot have the physical and chemical properties of the zinc oxide layer ; Once again, the preparation method can not obtain the zinc oxide array film with different micro / nano composite structures inside and outside the layer

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