Three-dimensional vibration interferometry device based on spherical cooperative target

Abstract

The invention discloses a three-dimensional vibration interferometry device based on a spherical cooperative target, which is characterized by comprising a laser, and a micro objective, a pinhole, a lens, a dispersion prism, a diaphragm and a spherical reflector mirror which all have the same light axis and arranged in sequence in an advancing direction of output light beam of the laser, wherein the pinhole is fixed at a focal point of the micro objective, the distance from the lens to the pinhole is exactly the focal length of the lens, the position where the lens is positioned is regarded as a balance position, the lens is provided with an adjustment mechanism which moves back and forth in the direction of the light axis near the balance position of the lens, the spherical reflector mirror, as the cooperative target, is fixed on the surface of an object to be measured, and an imaging device is disposed outside a coherent light output face of the dispersion prism. The device has simple structure owing to the integration of main optical paths in a single dispersion prism, realizes the separation of vibration monitoring for the object to be measured from change monitoring of measurement optical paths, and can reach the purpose of three-dimensional vibration measurement for objects by using the spherical reflector mirror as cooperative target.

Description

technical field [0001] The invention relates to an interference measurement device, in particular to a three-dimensional vibration interference measurement device based on a spherical cooperative target. Background technique [0002] As an effective non-contact precision measuring device, laser interferometer has been used more and more commonly in the measurement of many physical parameters. Due to its advantages of high measurement accuracy, high sensitivity, large dynamic range and non-contact measurement, interferometers have also been widely used in the field of vibration measurement. [0003] Laser interferometers used in vibration measurements can generally be divided into two categories: [0004] (1) Homodyne interferometer - two beams of interfering light have the same frequency; [0005] (2) Heterodyne Interferometer - Two beams of interfering light have slightly different frequencies. [0006] Both of these methods are based on sub-amplitude interference, using...

AI Technical Summary

Problems solved by technology

In this monitor, through the special spectroscopic prism design, the vibration source is separated, which greatly improves the measurement accuracy. Although the rotation signal of the object can be measured, it is unfortunately not sensitive to the vibration in the direction of the object plane.

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