Display device based on micro-electromechanical system (MEMS) light valve and forming method thereof
A display device and light valve technology, applied in optics, optical components, static indicators, etc., can solve the problems of complex process and high manufacturing cost of the display device, and achieve the effects of reducing manufacturing cost, simple structure, and simplifying the manufacturing process
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[0060] In order to make the above-mentioned objectives, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0061] The display device according to the specific embodiment of the present invention will be described in detail below with reference to specific embodiments.
[0062] figure 1 It is a schematic diagram of the circuit structure of a MEMS light valve display device. Such as figure 1 As shown, the display device in this embodiment includes: a substrate, a plurality of scan lines 11, 12, ..., 1 m on the substrate, and a plurality of data lines 21, 22, ..., on the substrate. .., 2n, multiple MEMS switches 30, capacitors 40, and MEMS light valves 50 on the substrate; multiple scan lines are parallel to each other, multiple data lines are parallel to each other, and data lines and scan lines are perpendicular to each oth...
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