Exception handling method and exception handling method for process control

An exception handling and exception type technology, applied in the direction of comprehensive factory control, general control system, special data processing application, etc., can solve the problems of reducing production capacity, large continuous workload, etc. effect of error

Active Publication Date: 2011-11-16
TAIWAN SEMICON MFG CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] When handling anomalies manually it usually takes a considerable amount of time, an engineer may spend hours

Method used

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  • Exception handling method and exception handling method for process control
  • Exception handling method and exception handling method for process control
  • Exception handling method and exception handling method for process control

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Embodiment Construction

[0038] Methods of making and using various embodiments of the invention are discussed in detail below. It should be noted, however, that the present invention provides many possible inventive concepts that can be implemented in various specific scopes. These specific examples are only used to illustrate the method of making and using the present invention, but not to limit the scope of the present invention.

[0039] The present invention will be explained by taking an abnormality handling intelligent manufacturing procedure control system under the advanced process control APC as an example, and the present invention is also applicable to abnormality handling in other situations and other process control systems.

[0040] figure 1 Is a block diagram of a processor system 10, which is an embodiment of the present invention. Processor system 10 is a general purpose computer platform and can be used to implement any or all of the methods discussed herein. The processor system...

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Abstract

The present invention provides an exception handling method and an exception handling method for process control. The method for exception handling comprises accessing an exception type for an exception, filtering historical data based on at least one defined criterion to provide a data train comprising data sets, assigning a weight to each data set, and providing a current control parameter. The data sets each comprise a historical condition and a historical control parameter, and the weight assigned to each data set is based on each historical condition. The current control parameter is provided using the weight and the historical control parameter for each data set. Accorrding to the invention, the maintaining load of a known processing programe is reduced, and the computing time of a known processing program for determining the control parameter is also reduced.

Description

technical field [0001] The invention relates to a semiconductor element process, in particular to the processing of abnormal events in process control. Background technique [0002] Generally speaking, abnormal events in the semiconductor device process often occur, and the abnormal events may interrupt and hinder the normal control process in the process control system. These abnormal events may be, for example, new-tape-out (NTO), long-time-no-run (LTNR), periodic maintenance (PM) and new chamber releases. Gas (new chamber release) and so on. The impact of abnormal events may cause a mismatch between process control parameters and the actual state of the instrument or process. In general, the effects of the aforementioned abnormal events are ambiguous in the modular process, or typically make the modular process of the normal control algorithm rules very difficult. [0003] After an abnormal event occurs, the engineer generally enters a control parameter in an attempt t...

Claims

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Application Information

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IPC IPC(8): G05B19/418H01L21/00
CPCG05B2219/33303G05B2219/31352G06F17/30G06F7/00G05B19/41865G06F16/00
Inventor 蔡柏沣宋金宁曾衍迪王若飞牟忠一
Owner TAIWAN SEMICON MFG CO LTD
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