Waste heat utilization device for semiconductor production line and operating method thereof

Abstract

The invention discloses a waste heat utilization device for a semiconductor production line and an operating method thereof. The invention in particular relates to a heat source recycling device for a purification plant in a semiconductor chip manufactory and the operating method of the device. The device comprises a device for generating waste heat and a purification plant, as well as an air outlet, an air inlet, pipelines, a valve 1, a valve 2 and a valve 3, a temperature sensor and a controller, wherein the device for generating waste heat, the purification plant, the air outlet and the air inlet are connected through the pipelines; the valve 1 is arranged at the position of the air outlet; the valve 3 is arranged at the position of the air inlet; and the valve 2 is arranged on the pipeline between the device for generating waste heat and the purification plant; the temperature sensor comprises a sensor 1, a sensor 2 and a sensor 3; the sensor 1 is arranged at the position of a waste heat outlet of the device for generating waste heat; the sensor 2 is arranged at the position of the purification plant; and the sensor 3 is arranged outside the air inlet; and the valve 1, the valve 2 and the valve 3, as well as the sensor 1, the sensor 2 and the sensor 3, are respectively connected with the controller. Through the recycling of energy sources in a workshop, the resource utilization ratio is improved, the production and manufacturing cost is lowered, and the device and the method are suitable for the production requirements for low carbon and environmentally friendliness.

Description

Technical field [0001] The invention relates to a device for energy recovery and utilization and a working method, and in particular to a device for recycling and utilization of heat sources in a purification workshop of a semiconductor chip manufacturing plant and a working method of the device. Background technique [0002] The current semiconductor production workshops are mostly purification workshops. The production equipment inside is easy to produce a large amount of high-temperature gas and discharge it. For example, the high-temperature waste heat emitted by waste heat equipment (diffusion furnace, oven, air compressor...) can generally reach 80°C. Or so, if this high-temperature gas is directly discharged into the air, it is a great waste. Generally, semiconductor production workshops have relatively high requirements for temperature. At present, air conditioners are usually used to adjust indoor temperature, which will increase production costs. [0003] The contradicti...

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Problems solved by technology

[0002] Most of the current semiconductor production workshops are purification workshops, and the production equipment inside is likely to generate a large amount of high-temperature gas and discharge it. For example, the high-temperature waste heat emitted by waste heat equipment (diffusion furnace, oven, air compressor...) can generally reach 80 ℃ or so, if this high temperature gas is directly discharged into the air, it is a great waste

In general, semiconductor production workshops have relatively high temperature requirements. At present, air conditioners are usually used to adjust the indoor temperature, which will increase production costs.

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